Evaporation-driven nanomachining to fabricate nanopores in SIO2

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    Abstract

    We demonstrate a novel method to produce high aspect ratio nanopores in fused silica (SiO2) using basic cleanroom techniques and high temperature. We found that gold nanoparticles on silicon oxide (SiO2) move perpendicularly to the surface into the substrate when heated at 1050°C, creating cylindrical nanopores that can reach extreme aspect ratios (diameter = 25 nm, length up to 800 nm). Fabrication of single nanopores as well as of freely patterned nanopore arrays is straightforward by prior Au surface patterning without the need for conventional nanolithographic techniques. We demonstrate manufacturing of arrays of 106 dead-end pores and manufacturing of membrane through-holes.
    Original languageEnglish
    Title of host publication18th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2014
    PublisherChemical and Biochemical Society
    Pages1844-1846
    Number of pages3
    ISBN (Print)978-0-9798064-7-6
    Publication statusPublished - 26 Oct 2014
    Event18th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2014 - Henry B. Gonzalez Convention Center, San Antonio, United States
    Duration: 26 Oct 201430 Oct 2014
    Conference number: 18

    Publication series

    NameMicroTAS
    PublisherChemical and Biochemical Society
    Volume2014
    ISSN (Print)1556-5904

    Conference

    Conference18th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2014
    Abbreviated titleMicroTAS 2014
    CountryUnited States
    CitySan Antonio
    Period26/10/1430/10/14

    Keywords

    • Gold nanoparticle
    • Membrane
    • Silica
    • Solid-state nanopore

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