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Dive into the research topics of 'Excitation and detection of vibrations of micromechanical structures using a dielectric thin film'. Together they form a unique fingerprint.- Sort by
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S. Bouwstra, F.R. Blom, T.S.J. Lammerink, H. Yntema, P. Schrap, J.H.J. Fluitman, M. Elwenspoek
Research output: Contribution to journal › Article › Academic