Experimental analysis of thermomechanical noise in micro Coriolis mass flow sensors

Dennis Alveringh (Corresponding Author), Remco J. Wiegerink, Jarno Groenesteijn, Remco G.P. Sanders, Joost Conrad Lötters

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Abstract

Coriolis mass flow sensors mechanically detect mass flows using a vibrating channel. For microfabricated sensors, thermomechanical noise causes random vibrations and defines therefore a fundamental limit to the resolution of the sensor. This is modeled using the equipartition theorem. In an experimental setup, the displacement of the channel due to thermomechanical noise is measured using a laser Doppler vibrometer for temperatures between approximately 300 K and 700 K. The results show RMS vibration amplitudes of 38 pm to 57 pm for a bandwidth of 13 Hz, as predicted by the model. This corresponds to a noise equivalent mass flow of 0.3 ng/s. It is shown that the resolution of the currently most sensitive Coriolis mass sensor is still one to two orders of magnitude above the thermal noise limit.
Original languageEnglish
Pages (from-to)212-216
Number of pages5
JournalSensors and actuators. A: Physical
Volume271
DOIs
Publication statusPublished - 1 Mar 2018

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mass flow
sensors
Sensors
equipartition theorem
random vibration
Thermal noise
vibration meters
thermal noise
bandwidth
Bandwidth
vibration
Lasers
causes
lasers
Temperature
temperature

Keywords

  • Coriolis flow sensor
  • Mass flow
  • Thermomechanical noise
  • MEMS
  • Equipartition theorem
  • Johnson–Nyquist
  • Signal to noise ratio
  • Laser Doppler vibrometry

Cite this

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title = "Experimental analysis of thermomechanical noise in micro Coriolis mass flow sensors",
abstract = "Coriolis mass flow sensors mechanically detect mass flows using a vibrating channel. For microfabricated sensors, thermomechanical noise causes random vibrations and defines therefore a fundamental limit to the resolution of the sensor. This is modeled using the equipartition theorem. In an experimental setup, the displacement of the channel due to thermomechanical noise is measured using a laser Doppler vibrometer for temperatures between approximately 300 K and 700 K. The results show RMS vibration amplitudes of 38 pm to 57 pm for a bandwidth of 13 Hz, as predicted by the model. This corresponds to a noise equivalent mass flow of 0.3 ng/s. It is shown that the resolution of the currently most sensitive Coriolis mass sensor is still one to two orders of magnitude above the thermal noise limit.",
keywords = "Coriolis flow sensor, Mass flow, Thermomechanical noise, MEMS, Equipartition theorem, Johnson–Nyquist, Signal to noise ratio, Laser Doppler vibrometry",
author = "Dennis Alveringh and Wiegerink, {Remco J.} and Jarno Groenesteijn and Sanders, {Remco G.P.} and L{\"o}tters, {Joost Conrad}",
year = "2018",
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language = "English",
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journal = "Sensors and actuators. A: Physical",
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Experimental analysis of thermomechanical noise in micro Coriolis mass flow sensors. / Alveringh, Dennis (Corresponding Author); Wiegerink, Remco J.; Groenesteijn, Jarno; Sanders, Remco G.P.; Lötters, Joost Conrad.

In: Sensors and actuators. A: Physical, Vol. 271, 01.03.2018, p. 212-216.

Research output: Contribution to journalArticleAcademicpeer-review

TY - JOUR

T1 - Experimental analysis of thermomechanical noise in micro Coriolis mass flow sensors

AU - Alveringh, Dennis

AU - Wiegerink, Remco J.

AU - Groenesteijn, Jarno

AU - Sanders, Remco G.P.

AU - Lötters, Joost Conrad

PY - 2018/3/1

Y1 - 2018/3/1

N2 - Coriolis mass flow sensors mechanically detect mass flows using a vibrating channel. For microfabricated sensors, thermomechanical noise causes random vibrations and defines therefore a fundamental limit to the resolution of the sensor. This is modeled using the equipartition theorem. In an experimental setup, the displacement of the channel due to thermomechanical noise is measured using a laser Doppler vibrometer for temperatures between approximately 300 K and 700 K. The results show RMS vibration amplitudes of 38 pm to 57 pm for a bandwidth of 13 Hz, as predicted by the model. This corresponds to a noise equivalent mass flow of 0.3 ng/s. It is shown that the resolution of the currently most sensitive Coriolis mass sensor is still one to two orders of magnitude above the thermal noise limit.

AB - Coriolis mass flow sensors mechanically detect mass flows using a vibrating channel. For microfabricated sensors, thermomechanical noise causes random vibrations and defines therefore a fundamental limit to the resolution of the sensor. This is modeled using the equipartition theorem. In an experimental setup, the displacement of the channel due to thermomechanical noise is measured using a laser Doppler vibrometer for temperatures between approximately 300 K and 700 K. The results show RMS vibration amplitudes of 38 pm to 57 pm for a bandwidth of 13 Hz, as predicted by the model. This corresponds to a noise equivalent mass flow of 0.3 ng/s. It is shown that the resolution of the currently most sensitive Coriolis mass sensor is still one to two orders of magnitude above the thermal noise limit.

KW - Coriolis flow sensor

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KW - Thermomechanical noise

KW - MEMS

KW - Equipartition theorem

KW - Johnson–Nyquist

KW - Signal to noise ratio

KW - Laser Doppler vibrometry

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DO - 10.1016/j.sna.2018.01.024

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ER -