Experimental investigation of anisotropy in isotropic silicon etching

Vitaly Svetovoy, Johan W. Berenschot, Michael Curt Elwenspoek

    Research output: Contribution to journalArticleAcademicpeer-review

    11 Citations (Scopus)
    5 Downloads (Pure)

    Fingerprint

    Dive into the research topics of 'Experimental investigation of anisotropy in isotropic silicon etching'. Together they form a unique fingerprint.