Experimental investigation of dual wave optimized reflector stacks in solidly mounted resonators

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    2 Citations (Scopus)

    Abstract

    Optimizing the reflector stacks for both longitudinal and shear waves is critical in the design of SMRs for high Quality factor (Q) filters. In this work, we experimentally investigate two design approaches for reflector stack optimization, i.e. the phase error approach and the diffraction grating method (DGM). Various SiO2/W reflector stacks were fabricated and analyzed: one stack using DGM and four others using the phase error approach. The extracted ID Q shows the expected trend except for the quarter-wave like stack. 2D FEM simulations reveal that the quarter-wave stack with an increased top-oxide layer shows improved shear reflection. The DGM stack showed the highest experimental Q of 1700. The results indicate that these approaches are applicable for any reflector stack combination.
    Original languageEnglish
    Title of host publicationProceedings IEEE International Ultrasonics Symposium, IUS 2011
    Place of PublicationLos Alamitos, CA, USA
    PublisherIEEE
    Pages-1234
    ISBN (Print)1237
    DOIs
    Publication statusPublished - 2011
    EventIEEE International Ultrasonics Symposium, IUS 2011 - Orlando, United States
    Duration: 18 Oct 201121 Oct 2011

    Publication series

    Name
    PublisherIEEE
    ISSN (Print)1948-5719

    Conference

    ConferenceIEEE International Ultrasonics Symposium, IUS 2011
    Abbreviated titleIUS
    CountryUnited States
    CityOrlando
    Period18/10/1121/10/11

    Keywords

    • METIS-297983
    • IR-88050

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  • Cite this

    Jose, S., & Hueting, R. J. E. (2011). Experimental investigation of dual wave optimized reflector stacks in solidly mounted resonators. In Proceedings IEEE International Ultrasonics Symposium, IUS 2011 (pp. -1234). Los Alamitos, CA, USA: IEEE. https://doi.org/10.1109/ULTSYM.2011.0304