Experimental investigation of dual wave optimized reflector stacks in solidly mounted resonators

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

1 Citation (Scopus)

Abstract

Optimizing the reflector stacks for both longitudinal and shear waves is critical in the design of SMRs for high Quality factor (Q) filters. In this work, we experimentally investigate two design approaches for reflector stack optimization, i.e. the phase error approach and the diffraction grating method (DGM). Various SiO2/W reflector stacks were fabricated and analyzed: one stack using DGM and four others using the phase error approach. The extracted ID Q shows the expected trend except for the quarter-wave like stack. 2D FEM simulations reveal that the quarter-wave stack with an increased top-oxide layer shows improved shear reflection. The DGM stack showed the highest experimental Q of 1700. The results indicate that these approaches are applicable for any reflector stack combination.
Original languageEnglish
Title of host publicationProceedings IEEE International Ultrasonics Symposium, IUS 2011
Place of PublicationLos Alamitos, CA, USA
PublisherIEEE
Pages-1234
ISBN (Print)1237
DOIs
Publication statusPublished - 2011
EventIEEE International Ultrasonics Symposium, IUS 2011 - Orlando, United States
Duration: 18 Oct 201121 Oct 2011

Publication series

Name
PublisherIEEE
ISSN (Print)1948-5719

Conference

ConferenceIEEE International Ultrasonics Symposium, IUS 2011
Abbreviated titleIUS
CountryUnited States
CityOrlando
Period18/10/1121/10/11

Fingerprint

reflectors
resonators
gratings (spectra)
phase error
longitudinal waves
S waves
Q factors
shear
trends
filters
optimization
oxides
simulation

Keywords

  • METIS-297983
  • IR-88050

Cite this

Jose, S., & Hueting, R. J. E. (2011). Experimental investigation of dual wave optimized reflector stacks in solidly mounted resonators. In Proceedings IEEE International Ultrasonics Symposium, IUS 2011 (pp. -1234). Los Alamitos, CA, USA: IEEE. https://doi.org/10.1109/ULTSYM.2011.0304
Jose, Sumy ; Hueting, Raymond Josephus Engelbart. / Experimental investigation of dual wave optimized reflector stacks in solidly mounted resonators. Proceedings IEEE International Ultrasonics Symposium, IUS 2011. Los Alamitos, CA, USA : IEEE, 2011. pp. -1234
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abstract = "Optimizing the reflector stacks for both longitudinal and shear waves is critical in the design of SMRs for high Quality factor (Q) filters. In this work, we experimentally investigate two design approaches for reflector stack optimization, i.e. the phase error approach and the diffraction grating method (DGM). Various SiO2/W reflector stacks were fabricated and analyzed: one stack using DGM and four others using the phase error approach. The extracted ID Q shows the expected trend except for the quarter-wave like stack. 2D FEM simulations reveal that the quarter-wave stack with an increased top-oxide layer shows improved shear reflection. The DGM stack showed the highest experimental Q of 1700. The results indicate that these approaches are applicable for any reflector stack combination.",
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Jose, S & Hueting, RJE 2011, Experimental investigation of dual wave optimized reflector stacks in solidly mounted resonators. in Proceedings IEEE International Ultrasonics Symposium, IUS 2011. IEEE, Los Alamitos, CA, USA, pp. -1234, IEEE International Ultrasonics Symposium, IUS 2011, Orlando, United States, 18/10/11. https://doi.org/10.1109/ULTSYM.2011.0304

Experimental investigation of dual wave optimized reflector stacks in solidly mounted resonators. / Jose, Sumy; Hueting, Raymond Josephus Engelbart.

Proceedings IEEE International Ultrasonics Symposium, IUS 2011. Los Alamitos, CA, USA : IEEE, 2011. p. -1234.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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AB - Optimizing the reflector stacks for both longitudinal and shear waves is critical in the design of SMRs for high Quality factor (Q) filters. In this work, we experimentally investigate two design approaches for reflector stack optimization, i.e. the phase error approach and the diffraction grating method (DGM). Various SiO2/W reflector stacks were fabricated and analyzed: one stack using DGM and four others using the phase error approach. The extracted ID Q shows the expected trend except for the quarter-wave like stack. 2D FEM simulations reveal that the quarter-wave stack with an increased top-oxide layer shows improved shear reflection. The DGM stack showed the highest experimental Q of 1700. The results indicate that these approaches are applicable for any reflector stack combination.

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Jose S, Hueting RJE. Experimental investigation of dual wave optimized reflector stacks in solidly mounted resonators. In Proceedings IEEE International Ultrasonics Symposium, IUS 2011. Los Alamitos, CA, USA: IEEE. 2011. p. -1234 https://doi.org/10.1109/ULTSYM.2011.0304