Experimental investigation of friction factors for gas flow across dense pillar matrices in microchannels

Srinivas Vanapalli, P.P.M. Lerou, Johannes Faas Burger, T.T. Veenstra, Herman J. Holland, G.C.F. Venhorst, Henricus V. Jansen, Hermanus J.M. ter Brake, Michael Curt Elwenspoek

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Abstract

An experimental study of low Reynolds number gas flow across pillars in a microchannel is presented. Various geometries of pillars are considered for systematic comparison. This is for the first time such an investigation is done. The pillars 25 um in diameter and height of 230 um are dry etched in silicon. a 4-point pressure drop measurement setup is used to avoid measuring losses in fittings. Among various geometries considered, shifted sine pattern and rhombus shaped structures with an aspect ratio of 1/3 have the lowest friction factor and circle staggered arrangement has the highest friction factor.
Original languageEnglish
Title of host publication16th MicroMechanics Europe Workshop, MME 2005
Place of PublicationChalmers, UK
PublisherChalmers University of Technology
Pages354-357
Number of pages4
ISBN (Print)978-0-4445-1037-2
Publication statusPublished - 2005
Event16th MicroMechanics Europe Workshop, MME 2005 - Göteborg, Sweden
Duration: 4 Sep 20056 Sep 2005
Conference number: 16

Workshop

Workshop16th MicroMechanics Europe Workshop, MME 2005
Abbreviated titleMME
CountrySweden
CityGöteborg
Period4/09/056/09/05

Keywords

  • METIS-228482
  • IR-54382
  • MEMS
  • EWI-19673
  • Friction factor
  • Micro-gas flow
  • regenerator
  • microcooler

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