Experimental investigation of friction factors for gas flow across dense pillar matrices in microchannels

Srinivas Vanapalli; P.P.M. Lerou; Johannes Faas Burger; T.T. Veenstra; Herman J. Holland; G.C.F. Venhorst; Henricus V. Jansen; Hermanus J.M. ter Brake; Michael Curt Elwenspoek

Experimental investigation of friction factors for gas flow across dense pillar matrices in microchannels

Srinivas Vanapalli, P.P.M. Lerou, Johannes Faas Burger, T.T. Veenstra, Herman J. Holland, G.C.F. Venhorst, Henricus V. Jansen, Hermanus J.M. ter Brake, Michael Curt Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Abstract

An experimental study of low Reynolds number gas flow across pillars in a microchannel is presented. Various geometries of pillars are considered for systematic comparison. This is for the first time such an investigation is done. The pillars 25 um in diameter and height of 230 um are dry etched in silicon. a 4-point pressure drop measurement setup is used to avoid measuring losses in fittings. Among various geometries considered, shifted sine pattern and rhombus shaped structures with an aspect ratio of 1/3 have the lowest friction factor and circle staggered arrangement has the highest friction factor.

Original language	English
Title of host publication	16th MicroMechanics Europe Workshop, MME 2005
Place of Publication	Chalmers, UK
Publisher	Chalmers University of Technology
Pages	354-357
Number of pages	4
ISBN (Print)	978-0-4445-1037-2
Publication status	Published - 2005
Event	16th MicroMechanics Europe Workshop, MME 2005 - Göteborg, Sweden Duration: 4 Sept 2005 → 6 Sept 2005 Conference number: 16

Workshop

Workshop	16th MicroMechanics Europe Workshop, MME 2005
Abbreviated title	MME
Country/Territory	Sweden
City	Göteborg
Period	4/09/05 → 6/09/05

Keywords

METIS-228482
IR-54382
MEMS
EWI-19673
Friction factor
Micro-gas flow
regenerator
microcooler

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Vanapalli, S., Lerou, P. P. M., Burger, J. F., Veenstra, T. T., Holland, H. J., Venhorst, G. C. F., Jansen, H. V., ter Brake, H. J. M., & Elwenspoek, M. C. (2005). Experimental investigation of friction factors for gas flow across dense pillar matrices in microchannels. In 16th MicroMechanics Europe Workshop, MME 2005 (pp. 354-357). Chalmers University of Technology.

@inproceedings{12b6b7b72426464e91ccea977ccf6a6a,

title = "Experimental investigation of friction factors for gas flow across dense pillar matrices in microchannels",

abstract = "An experimental study of low Reynolds number gas flow across pillars in a microchannel is presented. Various geometries of pillars are considered for systematic comparison. This is for the first time such an investigation is done. The pillars 25 um in diameter and height of 230 um are dry etched in silicon. a 4-point pressure drop measurement setup is used to avoid measuring losses in fittings. Among various geometries considered, shifted sine pattern and rhombus shaped structures with an aspect ratio of 1/3 have the lowest friction factor and circle staggered arrangement has the highest friction factor.",

keywords = "METIS-228482, IR-54382, MEMS, EWI-19673, Friction factor, Micro-gas flow, regenerator, microcooler",

author = "Srinivas Vanapalli and P.P.M. Lerou and Burger, {Johannes Faas} and T.T. Veenstra and Holland, {Herman J.} and G.C.F. Venhorst and Jansen, {Henricus V.} and {ter Brake}, {Hermanus J.M.} and Elwenspoek, {Michael Curt}",

year = "2005",

language = "English",

isbn = "978-0-4445-1037-2",

pages = "354--357",

booktitle = "16th MicroMechanics Europe Workshop, MME 2005",

publisher = "Chalmers University of Technology",

address = "Sweden",

note = "16th MicroMechanics Europe Workshop, MME 2005, MME ; Conference date: 04-09-2005 Through 06-09-2005",

}

Vanapalli, S, Lerou, PPM, Burger, JF, Veenstra, TT, Holland, HJ, Venhorst, GCF, Jansen, HV, ter Brake, HJM & Elwenspoek, MC 2005, Experimental investigation of friction factors for gas flow across dense pillar matrices in microchannels. in 16th MicroMechanics Europe Workshop, MME 2005. Chalmers University of Technology, Chalmers, UK, pp. 354-357, 16th MicroMechanics Europe Workshop, MME 2005, Göteborg, Sweden, 4/09/05.

Experimental investigation of friction factors for gas flow across dense pillar matrices in microchannels. / Vanapalli, Srinivas; Lerou, P.P.M.; Burger, Johannes Faas et al.
16th MicroMechanics Europe Workshop, MME 2005. Chalmers, UK: Chalmers University of Technology, 2005. p. 354-357.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Experimental investigation of friction factors for gas flow across dense pillar matrices in microchannels

AU - Vanapalli, Srinivas

AU - Lerou, P.P.M.

AU - Burger, Johannes Faas

AU - Veenstra, T.T.

AU - Holland, Herman J.

AU - Venhorst, G.C.F.

AU - Jansen, Henricus V.

AU - ter Brake, Hermanus J.M.

AU - Elwenspoek, Michael Curt

N1 - Conference code: 16

PY - 2005

Y1 - 2005

N2 - An experimental study of low Reynolds number gas flow across pillars in a microchannel is presented. Various geometries of pillars are considered for systematic comparison. This is for the first time such an investigation is done. The pillars 25 um in diameter and height of 230 um are dry etched in silicon. a 4-point pressure drop measurement setup is used to avoid measuring losses in fittings. Among various geometries considered, shifted sine pattern and rhombus shaped structures with an aspect ratio of 1/3 have the lowest friction factor and circle staggered arrangement has the highest friction factor.

AB - An experimental study of low Reynolds number gas flow across pillars in a microchannel is presented. Various geometries of pillars are considered for systematic comparison. This is for the first time such an investigation is done. The pillars 25 um in diameter and height of 230 um are dry etched in silicon. a 4-point pressure drop measurement setup is used to avoid measuring losses in fittings. Among various geometries considered, shifted sine pattern and rhombus shaped structures with an aspect ratio of 1/3 have the lowest friction factor and circle staggered arrangement has the highest friction factor.

KW - METIS-228482

KW - IR-54382

KW - MEMS

KW - EWI-19673

KW - Friction factor

KW - Micro-gas flow

KW - regenerator

KW - microcooler

M3 - Conference contribution

SN - 978-0-4445-1037-2

SP - 354

EP - 357

BT - 16th MicroMechanics Europe Workshop, MME 2005

PB - Chalmers University of Technology

CY - Chalmers, UK

T2 - 16th MicroMechanics Europe Workshop, MME 2005

Y2 - 4 September 2005 through 6 September 2005

ER -

Experimental investigation of friction factors for gas flow across dense pillar matrices in microchannels

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Keywords

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