Exploiting channeling in Helium Ion Microscopy

Gregor Hlawacek; Vasilisa Veligura; Stefan Lorbek; Tijs F. Mocking; Anton George; Raoul Van Gastel; Harold J.W. Zandvliet; Bene Poelsema

doi:10.1017/S1431927612005880

Exploiting channeling in Helium Ion Microscopy

Gregor Hlawacek
, Vasilisa Veligura
, Stefan Lorbek
, Tijs F. Mocking
, Anton George
, Raoul Van Gastel
, Harold J.W. Zandvliet
, Bene Poelsema

Research output: Contribution to journal › Article › Academic › peer-review

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Original language	English
Pages (from-to)	806-807
Number of pages	2
Journal	Microscopy and microanalysis
Volume	18
Issue number	S2
DOIs	https://doi.org/10.1017/S1431927612005880
Publication status	Published - 23 Nov 2012

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10.1017/S1431927612005880

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@article{328224bfe0474c439e1857a1dec16f76,

title = "Exploiting channeling in Helium Ion Microscopy",

author = "Gregor Hlawacek and Vasilisa Veligura and Stefan Lorbek and Mocking, \{Tijs F.\} and Anton George and \{Van Gastel\}, Raoul and Zandvliet, \{Harold J.W.\} and Bene Poelsema",

year = "2012",

month = nov,

day = "23",

doi = "10.1017/S1431927612005880",

language = "English",

volume = "18",

pages = "806--807",

journal = "Microscopy and microanalysis",

issn = "1431-9276",

publisher = "Oxford University Press",

number = "S2",

}

TY - JOUR

T1 - Exploiting channeling in Helium Ion Microscopy

AU - Hlawacek, Gregor

AU - Veligura, Vasilisa

AU - Lorbek, Stefan

AU - Mocking, Tijs F.

AU - George, Anton

AU - Van Gastel, Raoul

AU - Zandvliet, Harold J.W.

AU - Poelsema, Bene

PY - 2012/11/23

Y1 - 2012/11/23

UR - https://www.scopus.com/pages/publications/85007976321

U2 - 10.1017/S1431927612005880

DO - 10.1017/S1431927612005880

M3 - Article

AN - SCOPUS:85007976321

SN - 1431-9276

VL - 18

SP - 806

EP - 807

JO - Microscopy and microanalysis

JF - Microscopy and microanalysis

IS - S2

ER -

Exploiting channeling in Helium Ion Microscopy

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