Abstract
In this work we explore an uncommon method to extract the piezoelectric coefficient of the piezoelectric material aluminum nitride. The method exploits the bias
dependence of CV (capacitance voltage) measurements on M_M (metal-piezoelectric-metal) capacitors. We propose a bias dependent capacitance model for piezoelectric capacitors such as BAW (Bulk Acoustic Wave) resonators. With this model we extract both the piezoelectric coefficient and dielectric constant from the CV recording. In contrast to earlier reports we verified that our results do not depend on layer thickness, biasing and sweep direction of the CV recording.
In addition, we discuss the accuracy of our measurements in depth.
Original language | Undefined |
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Title of host publication | 24th International Conference on Microelectronic Test Structures, ICMTS 2011 |
Place of Publication | USA |
Publisher | IEEE |
Pages | 69-73 |
Number of pages | 5 |
ISBN (Print) | 978-1-4244-8527-7 |
DOIs | |
Publication status | Published - 4 Apr 2011 |
Event | 24th International Conference on Microelectronic Test Structures, ICMTS 2011 - Amsterdam, Netherlands Duration: 4 Apr 2011 → 7 Apr 2011 Conference number: 24 http://www.homepages.ed.ac.uk/ajw/ICMTS/prog11.pdf |
Publication series
Name | |
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Publisher | IEEE Electron Devices Society |
ISSN (Print) | 1071-9032 |
Conference
Conference | 24th International Conference on Microelectronic Test Structures, ICMTS 2011 |
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Abbreviated title | ICMTS |
Country/Territory | Netherlands |
City | Amsterdam |
Period | 4/04/11 → 7/04/11 |
Internet address |
Keywords
- METIS-278718
- EWI-20199
- IR-77949