Exploring microstencils for sub-micron patterning using pulsed laser deposition

F. Vroegindeweij, E.A. Speets, J.A.J. Steen, J.P. Brugger, David H.A. Blank

Research output: Contribution to journalArticleAcademicpeer-review

25 Citations (Scopus)

Abstract

The possibilities of sub-micron patterning by means of microstencils using pulsed laser deposition were investigated. Stencils with circular and elliptical patterns were used, with pore sizes ranging from 1 um down to 500 nm. Strontium titanate (SrTiO3), silicon (Si) and self-assembled monolayers on gold were used as substrate materials, whereas nickel (Ni), nickel oxide (NiO) and gold (Au) have been deposited. The results show that the chosen deposition setup makes an easy and fast way for high-quality pattern creation.
Original languageEnglish
Pages (from-to)743-745
Number of pages3
JournalApplied physics A: Materials science and processing
Volume79
Issue number4-6
DOIs
Publication statusPublished - 2004

Keywords

  • IR-47734
  • METIS-218580

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