Explosive micro-bubble actuator

D.M. van den Broek, Michael Curt Elwenspoek

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

4 Citations (Scopus)

Abstract

Explosive evaporation occurs when a thin layer of liquid reaches a very high temperature in a very short time. At these temperatures homogeneous nucleation takes place. The nucleated bubbles almost instantly coalesce forming a vapour film followed by rapid growth due to the pressure impulse and finally the bubbles collapse. This effect, which already has proven its use in current inkjet printer technology, can be used to produce mechanical work. In this case it will be utilised to deflect a 250×250¿m2 square and 1 ¿m thick low-stress silicon-nitride membrane. Within a few microseconds it can produce a pressure of several bar resulting in a membrane deflection of micrometers and a membrane speed of more than 1m/s.
Original languageUndefined
Title of host publicationSolid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Place of PublicationLos Alamitos
PublisherIEEE Computer Society Press
Pages2441-2444
Number of pages4
ISBN (Print)1-4244-0842-3
DOIs
Publication statusPublished - 10 Jun 2007
Event14th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2007 - Lyon, France
Duration: 10 Jun 200714 Jun 2007
Conference number: 14

Publication series

Name
PublisherIEEE Computer Society Press

Conference

Conference14th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2007
Abbreviated titleTRANSDUCERS 2007
CountryFrance
CityLyon
Period10/06/0714/06/07

Keywords

  • EWI-11919
  • METIS-247101
  • IR-62173

Cite this

van den Broek, D. M., & Elwenspoek, M. C. (2007). Explosive micro-bubble actuator. In Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International (pp. 2441-2444). [10.1109/SENSOR.2007.4300664] Los Alamitos: IEEE Computer Society Press. https://doi.org/10.1109/SENSOR.2007.4300664
van den Broek, D.M. ; Elwenspoek, Michael Curt. / Explosive micro-bubble actuator. Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International. Los Alamitos : IEEE Computer Society Press, 2007. pp. 2441-2444
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abstract = "Explosive evaporation occurs when a thin layer of liquid reaches a very high temperature in a very short time. At these temperatures homogeneous nucleation takes place. The nucleated bubbles almost instantly coalesce forming a vapour film followed by rapid growth due to the pressure impulse and finally the bubbles collapse. This effect, which already has proven its use in current inkjet printer technology, can be used to produce mechanical work. In this case it will be utilised to deflect a 250{\~A}—250{\^A}¿m2 square and 1 {\^A}¿m thick low-stress silicon-nitride membrane. Within a few microseconds it can produce a pressure of several bar resulting in a membrane deflection of micrometers and a membrane speed of more than 1m/s.",
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van den Broek, DM & Elwenspoek, MC 2007, Explosive micro-bubble actuator. in Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International., 10.1109/SENSOR.2007.4300664, IEEE Computer Society Press, Los Alamitos, pp. 2441-2444, 14th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2007, Lyon, France, 10/06/07. https://doi.org/10.1109/SENSOR.2007.4300664

Explosive micro-bubble actuator. / van den Broek, D.M.; Elwenspoek, Michael Curt.

Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International. Los Alamitos : IEEE Computer Society Press, 2007. p. 2441-2444 10.1109/SENSOR.2007.4300664.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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T1 - Explosive micro-bubble actuator

AU - van den Broek, D.M.

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PY - 2007/6/10

Y1 - 2007/6/10

N2 - Explosive evaporation occurs when a thin layer of liquid reaches a very high temperature in a very short time. At these temperatures homogeneous nucleation takes place. The nucleated bubbles almost instantly coalesce forming a vapour film followed by rapid growth due to the pressure impulse and finally the bubbles collapse. This effect, which already has proven its use in current inkjet printer technology, can be used to produce mechanical work. In this case it will be utilised to deflect a 250×250¿m2 square and 1 ¿m thick low-stress silicon-nitride membrane. Within a few microseconds it can produce a pressure of several bar resulting in a membrane deflection of micrometers and a membrane speed of more than 1m/s.

AB - Explosive evaporation occurs when a thin layer of liquid reaches a very high temperature in a very short time. At these temperatures homogeneous nucleation takes place. The nucleated bubbles almost instantly coalesce forming a vapour film followed by rapid growth due to the pressure impulse and finally the bubbles collapse. This effect, which already has proven its use in current inkjet printer technology, can be used to produce mechanical work. In this case it will be utilised to deflect a 250×250¿m2 square and 1 ¿m thick low-stress silicon-nitride membrane. Within a few microseconds it can produce a pressure of several bar resulting in a membrane deflection of micrometers and a membrane speed of more than 1m/s.

KW - EWI-11919

KW - METIS-247101

KW - IR-62173

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BT - Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International

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van den Broek DM, Elwenspoek MC. Explosive micro-bubble actuator. In Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International. Los Alamitos: IEEE Computer Society Press. 2007. p. 2441-2444. 10.1109/SENSOR.2007.4300664 https://doi.org/10.1109/SENSOR.2007.4300664