Explosive micro-bubble actuator

D.M. van den Broek; Michael Curt Elwenspoek

doi:10.1109/SENSOR.2007.4300664

Explosive micro-bubble actuator

D.M. van den Broek, Michael Curt Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

5 Citations (Scopus)

Abstract

Explosive evaporation occurs when a thin layer of liquid reaches a very high temperature in a very short time. At these temperatures homogeneous nucleation takes place. The nucleated bubbles almost instantly coalesce forming a vapour film followed by rapid growth due to the pressure impulse and finally the bubbles collapse. This effect, which already has proven its use in current inkjet printer technology, can be used to produce mechanical work. In this case it will be utilised to deflect a 250Ã—250Â¿m2 square and 1 Â¿m thick low-stress silicon-nitride membrane. Within a few microseconds it can produce a pressure of several bar resulting in a membrane deflection of micrometers and a membrane speed of more than 1m/s.

Original language	Undefined
Title of host publication	Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Place of Publication	Los Alamitos
Publisher	IEEE Computer Society Press
Pages	2441-2444
Number of pages	4
ISBN (Print)	1-4244-0842-3
DOIs	https://doi.org/10.1109/SENSOR.2007.4300664
Publication status	Published - 10 Jun 2007
Event	14th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2007 - Lyon, France Duration: 10 Jun 2007 → 14 Jun 2007 Conference number: 14

Publication series

Name
Publisher	IEEE Computer Society Press

Conference

Conference	14th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2007
Abbreviated title	TRANSDUCERS 2007
Country/Territory	France
City	Lyon
Period	10/06/07 → 14/06/07

Keywords

EWI-11919
METIS-247101
IR-62173

Access to Document

10.1109/SENSOR.2007.4300664

http://eprints.eemcs.utwente.nl/secure2/11919/01/explosive_micro_bubble_-_van_den_broek.pdf

Cite this

@inproceedings{e2d2871f4b1b4067a6dc37adb3358f06,

title = "Explosive micro-bubble actuator",

abstract = "Explosive evaporation occurs when a thin layer of liquid reaches a very high temperature in a very short time. At these temperatures homogeneous nucleation takes place. The nucleated bubbles almost instantly coalesce forming a vapour film followed by rapid growth due to the pressure impulse and finally the bubbles collapse. This effect, which already has proven its use in current inkjet printer technology, can be used to produce mechanical work. In this case it will be utilised to deflect a 250{\~A}—250{\^A}¿m2 square and 1 {\^A}¿m thick low-stress silicon-nitride membrane. Within a few microseconds it can produce a pressure of several bar resulting in a membrane deflection of micrometers and a membrane speed of more than 1m/s.",

keywords = "EWI-11919, METIS-247101, IR-62173",

author = "{van den Broek}, D.M. and Elwenspoek, {Michael Curt}",

note = "10.1109/SENSOR.2007.4300664 ; null ; Conference date: 10-06-2007 Through 14-06-2007",

year = "2007",

month = jun,

day = "10",

doi = "10.1109/SENSOR.2007.4300664",

language = "Undefined",

isbn = "1-4244-0842-3",

publisher = "IEEE Computer Society Press",

pages = "2441--2444",

booktitle = "Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International",

}

van den Broek, DM & Elwenspoek, MC 2007, Explosive micro-bubble actuator. in Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International., 10.1109/SENSOR.2007.4300664, IEEE Computer Society Press, Los Alamitos, pp. 2441-2444, 14th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2007, Lyon, France, 10/06/07. https://doi.org/10.1109/SENSOR.2007.4300664

Explosive micro-bubble actuator. / van den Broek, D.M.; Elwenspoek, Michael Curt.

Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International. Los Alamitos : IEEE Computer Society Press, 2007. p. 2441-2444 10.1109/SENSOR.2007.4300664.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Explosive micro-bubble actuator

AU - van den Broek, D.M.

AU - Elwenspoek, Michael Curt

N1 - Conference code: 14

PY - 2007/6/10

Y1 - 2007/6/10

N2 - Explosive evaporation occurs when a thin layer of liquid reaches a very high temperature in a very short time. At these temperatures homogeneous nucleation takes place. The nucleated bubbles almost instantly coalesce forming a vapour film followed by rapid growth due to the pressure impulse and finally the bubbles collapse. This effect, which already has proven its use in current inkjet printer technology, can be used to produce mechanical work. In this case it will be utilised to deflect a 250Ã—250Â¿m2 square and 1 Â¿m thick low-stress silicon-nitride membrane. Within a few microseconds it can produce a pressure of several bar resulting in a membrane deflection of micrometers and a membrane speed of more than 1m/s.

AB - Explosive evaporation occurs when a thin layer of liquid reaches a very high temperature in a very short time. At these temperatures homogeneous nucleation takes place. The nucleated bubbles almost instantly coalesce forming a vapour film followed by rapid growth due to the pressure impulse and finally the bubbles collapse. This effect, which already has proven its use in current inkjet printer technology, can be used to produce mechanical work. In this case it will be utilised to deflect a 250Ã—250Â¿m2 square and 1 Â¿m thick low-stress silicon-nitride membrane. Within a few microseconds it can produce a pressure of several bar resulting in a membrane deflection of micrometers and a membrane speed of more than 1m/s.

KW - EWI-11919

KW - METIS-247101

KW - IR-62173

U2 - 10.1109/SENSOR.2007.4300664

DO - 10.1109/SENSOR.2007.4300664

M3 - Conference contribution

SN - 1-4244-0842-3

SP - 2441

EP - 2444

BT - Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International

PB - IEEE Computer Society Press

CY - Los Alamitos

Y2 - 10 June 2007 through 14 June 2007

ER -