Explosive micro-bubble actuator

D.M. van den Broek, Michael Curt Elwenspoek

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    5 Citations (Scopus)


    Explosive evaporation occurs when a thin layer of liquid reaches a very high temperature in a very short time. At these temperatures homogeneous nucleation takes place. The nucleated bubbles almost instantly coalesce forming a vapour film followed by rapid growth due to the pressure impulse and finally the bubbles collapse. This effect, which already has proven its use in current inkjet printer technology, can be used to produce mechanical work. In this case it will be utilised to deflect a 250×250¿m2 square and 1 ¿m thick low-stress silicon-nitride membrane. Within a few microseconds it can produce a pressure of several bar resulting in a membrane deflection of micrometers and a membrane speed of more than 1m/s.
    Original languageUndefined
    Title of host publicationSolid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
    Place of PublicationLos Alamitos
    PublisherIEEE Computer Society Press
    Number of pages4
    ISBN (Print)1-4244-0842-3
    Publication statusPublished - 10 Jun 2007
    Event14th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2007 - Lyon, France
    Duration: 10 Jun 200714 Jun 2007
    Conference number: 14

    Publication series

    PublisherIEEE Computer Society Press


    Conference14th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2007
    Abbreviated titleTRANSDUCERS 2007


    • EWI-11919
    • METIS-247101
    • IR-62173

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