Exposure: an art from the past carrying the economical success of the 21st century

Regina Lüttge

Research output: Chapter in Book/Report/Conference proceedingChapterProfessional

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Original languageUndefined
Title of host publicationBelichting
EditorsM. Tijmes, F. van den Brink, H. Flisijn, H. de Jong, J. Everse, B. Julsing
Place of PublicationEnschede
PublisherETSV Scintilla
Pages109-116
Number of pages8
ISBN (Print)not assigned
Publication statusPublished - Dec 2006

Publication series

NameE.T.S.V. Scintilla Jaarboek 2005-2006
PublisherETSV Scintilla Universiteit Twente

Keywords

  • TST-SMI: Formerly in EWI-SMI
  • TST-LIL: Laser Interference Lithography
  • METIS-233153
  • IR-63939
  • EWI-9208

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