Extraction of Kinetic Parameters for the Chemical Vapor Deposition of Polycrystalline Silicon at Medium and Low Pressures

J. Holleman, J.F. Verweij, Jan F. Verweij

    Research output: Contribution to journalArticleAcademicpeer-review

    17 Citations (Scopus)
    491 Downloads (Pure)

    Fingerprint

    Dive into the research topics of 'Extraction of Kinetic Parameters for the Chemical Vapor Deposition of Polycrystalline Silicon at Medium and Low Pressures'. Together they form a unique fingerprint.