Extraction of second order piezoelectric parameters in bulk acoustic wave resonators

T. van Hemert; Klaus Reimann; Raymond Josephus Engelbart Hueting

doi:10.1063/1.4725503

Extraction of second order piezoelectric parameters in bulk acoustic wave resonators

T. van Hemert, Klaus Reimann, Raymond Josephus Engelbart Hueting

Research output: Contribution to journal › Article › Academic › peer-review

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Abstract

In this paper we demonstrate a method to extract the electric field dependence of first order piezoelectric parameters. We fit the Mason model to measured frequency dependent electrical impedance data of aluminum-nitride bulk acoustic wave resonators for various DC biasing. The impedance was fitted accurately at the mechanical resonances and in the quasi-static regime well below the resonance frequency. This revealed the dependence of the piezoelectric stiffness, charge constant, and permittivity on the electric field. From this the four second order piezoelectric parameters were calculated.

Original language	Undefined
Pages (from-to)	232901:1-232901:4
Number of pages	4
Journal	Applied physics letters
Volume	100
Issue number	23
DOIs	https://doi.org/10.1063/1.4725503
Publication status	Published - 5 Jun 2012

Keywords

EWI-22106
IR-80967
METIS-287955

Access to Document

10.1063/1.4725503

http://eprints.eemcs.utwente.nl/secure2/22106/01/apl_tom.pdf

Cite this

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N2 - In this paper we demonstrate a method to extract the electric field dependence of first order piezoelectric parameters. We fit the Mason model to measured frequency dependent electrical impedance data of aluminum-nitride bulk acoustic wave resonators for various DC biasing. The impedance was fitted accurately at the mechanical resonances and in the quasi-static regime well below the resonance frequency. This revealed the dependence of the piezoelectric stiffness, charge constant, and permittivity on the electric field. From this the four second order piezoelectric parameters were calculated.

AB - In this paper we demonstrate a method to extract the electric field dependence of first order piezoelectric parameters. We fit the Mason model to measured frequency dependent electrical impedance data of aluminum-nitride bulk acoustic wave resonators for various DC biasing. The impedance was fitted accurately at the mechanical resonances and in the quasi-static regime well below the resonance frequency. This revealed the dependence of the piezoelectric stiffness, charge constant, and permittivity on the electric field. From this the four second order piezoelectric parameters were calculated.

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KW - METIS-287955

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