Extreme ultraviolet broadband imaging spectrometer using dispersion-matched zone plates

Yahia Mostafa, Zoi Bouza, James Byers, Ievgeniia Babenko, Wim Ubachs, Oscar O. Versolato, Muharrem Bayraktar*

*Corresponding author for this work

Research output: Contribution to journalArticleAcademicpeer-review

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Abstract

We present simultaneous 1D imaging and broadband spectroscopy of a laser-produced plasma (LPP) source of extreme ultraviolet light, using a tapered zone plate that is matched to the dispersion of a transmission grating. We describe the design and fabrication of the zone plates in the 5-80 nm wavelength regime with designed spatial resolution of ∼10 µm and spectral resolution of ∼0.8 nm. Subsequently, we benchmark the imaging spectrometer with a solid tin target LPP. Plane wave propagation simulations qualitatively match the experimental results and confirm the device performance.

Original languageEnglish
Pages (from-to)4316-4319
Number of pages4
JournalOptics letters
Volume48
Issue number16
DOIs
Publication statusPublished - 15 Aug 2023

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