Extreme ultraviolet broadband imaging spectrometer using dispersion-matched zone plates

Yahia Mostafa; Zoi Bouza; James Byers; Ievgeniia Babenko; Wim Ubachs; Oscar O. Versolato; Muharrem Bayraktar

doi:10.1364/OL.496995

Extreme ultraviolet broadband imaging spectrometer using dispersion-matched zone plates

Yahia Mostafa, Zoi Bouza, James Byers, Ievgeniia Babenko, Wim Ubachs, Oscar O. Versolato, Muharrem Bayraktar^*

^*Corresponding author for this work

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Abstract

We present simultaneous 1D imaging and broadband spectroscopy of a laser-produced plasma (LPP) source of extreme ultraviolet light, using a tapered zone plate that is matched to the dispersion of a transmission grating. We describe the design and fabrication of the zone plates in the 5-80 nm wavelength regime with designed spatial resolution of ∼10 µm and spectral resolution of ∼0.8 nm. Subsequently, we benchmark the imaging spectrometer with a solid tin target LPP. Plane wave propagation simulations qualitatively match the experimental results and confirm the device performance.

Original language	English
Pages (from-to)	4316-4319
Number of pages	4
Journal	Optics letters
Volume	48
Issue number	16
DOIs	https://doi.org/10.1364/OL.496995
Publication status	Published - 15 Aug 2023

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Cite this

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author = "Yahia Mostafa and Zoi Bouza and James Byers and Ievgeniia Babenko and Wim Ubachs and Versolato, {Oscar O.} and Muharrem Bayraktar",

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AU - Mostafa, Yahia

AU - Bouza, Zoi

AU - Byers, James

AU - Babenko, Ievgeniia

AU - Ubachs, Wim

AU - Versolato, Oscar O.

AU - Bayraktar, Muharrem

PY - 2023/8/15

Y1 - 2023/8/15

N2 - We present simultaneous 1D imaging and broadband spectroscopy of a laser-produced plasma (LPP) source of extreme ultraviolet light, using a tapered zone plate that is matched to the dispersion of a transmission grating. We describe the design and fabrication of the zone plates in the 5-80 nm wavelength regime with designed spatial resolution of ∼10 µm and spectral resolution of ∼0.8 nm. Subsequently, we benchmark the imaging spectrometer with a solid tin target LPP. Plane wave propagation simulations qualitatively match the experimental results and confirm the device performance.

AB - We present simultaneous 1D imaging and broadband spectroscopy of a laser-produced plasma (LPP) source of extreme ultraviolet light, using a tapered zone plate that is matched to the dispersion of a transmission grating. We describe the design and fabrication of the zone plates in the 5-80 nm wavelength regime with designed spatial resolution of ∼10 µm and spectral resolution of ∼0.8 nm. Subsequently, we benchmark the imaging spectrometer with a solid tin target LPP. Plane wave propagation simulations qualitatively match the experimental results and confirm the device performance.

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DO - 10.1364/OL.496995

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VL - 48

SP - 4316

EP - 4319

JO - Optics letters

JF - Optics letters

IS - 16

ER -

Extreme ultraviolet broadband imaging spectrometer using dispersion-matched zone plates

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