Extremely ultrashallow junctions for a high-linearity silicon-on-glass RF varactor-diode technology

Lis K. Nanver*, Francesco Sarubbi, Viktor Gonda, Milos Popadić, Tom L.M. Scholtes, Wiebe De Boer, Koen Buisman

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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Engineering & Materials Science