Fabrication an packaging of mesa ISFETs

R.E.G. van Hal, Piet Bergveld, Johannes F.J. Engbersen

    Research output: Contribution to journalArticleAcademicpeer-review

    8 Citations (Scopus)
    Original languageUndefined
    Pages (from-to)455-468
    JournalSensors and materials
    Volume8
    Issue number7
    Publication statusPublished - 1996

    Keywords

    • METIS-111974

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