Fabrication an packaging of mesa ISFETs

R.E.G. van Hal, Piet Bergveld, Johannes F.J. Engbersen

    Research output: Contribution to journalArticleAcademicpeer-review

    8 Citations (Scopus)
    Original languageUndefined
    Pages (from-to)455-468
    JournalSensors and materials
    Issue number7
    Publication statusPublished - 1996


    • METIS-111974

    Cite this

    van Hal, R. E. G., Bergveld, P., & Engbersen, J. F. J. (1996). Fabrication an packaging of mesa ISFETs. Sensors and materials, 8(7), 455-468.