Fabrication and analysis of 3D inverse woodpile photonic crystals in silicon

Research output: Contribution to conference › Poster › Academic

Original language	English
Publication status	Published - 9 Apr 2024
Event	EuroNanoLab Experts School - Dry Etching - U Parkhotel Campus University of Twente, Enschede, Netherlands Duration: 9 Apr 2024 → 12 Apr 2024

Course	EuroNanoLab Experts School - Dry Etching
Country/Territory	Netherlands
City	Enschede
Period	9/04/24 → 12/04/24

Cite this

@conference{1c3c794373f74161960811791974e393,

title = "Fabrication and analysis of 3D inverse woodpile photonic crystals in silicon",

author = "Goodwin, {Melissa Jane} and Vreman, {Timon Jan} and Harteveld, {Cornelis A.M.} and Vos, {Willem L.}",

year = "2024",

month = apr,

day = "9",

language = "English",

note = "EuroNanoLab Experts School - Dry Etching ; Conference date: 09-04-2024 Through 12-04-2024",

}