Fabrication and characterization of an electrostatic contraction beams micromotor

Edin Sarajlic; Johan W. Berenschot; Niels Roelof Tas; H. Fujita; Gijsbertus J.M. Krijnen; Michael Curt Elwenspoek

doi:10.1109/MEMSYS.2006.1627924

Fabrication and characterization of an electrostatic contraction beams micromotor

Edin Sarajlic, Johan W. Berenschot, Niels Roelof Tas, H. Fujita, Gijsbertus J.M. Krijnen, Michael Curt Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

8 Citations (Scopus)

13 Downloads (Pure)

Abstract

We report on fabrication and experimental characterization of an electrostatic contraction beams motor that exhibits both reliable operation and high performance haracteristics. This electrostatic linear stepper micromotor is fabricated in a single polysilicon layer combining vertical trench isolation technology with standard surface micromachining. The entire motor, including two voltage-controlled clamps and eight pairs of contraction beams, fits in an area of 470 μm x 290 μm. Bidirectional stepping motion has been successfully demonstrated, generating a stroke of ± 70 μm by successively adding 10 nm steps. The motor was driven up to a cycling frequency of 80 kHz. An output force of 0.49 mN was measured for actuation voltages of 60 V on the beams and 50 V on the clamps. The motor was run for 160 hours at a cycling frequency of 10 kHz, generating nearly 5.8 billion steps.

Original language	English
Title of host publication	19th IEEE International Conference on MEMS 2006
Place of Publication	Los Alamitos
Publisher	IEEE
Pages	814-817
Number of pages	4
ISBN (Print)	0-7803-9475-5
DOIs	https://doi.org/10.1109/MEMSYS.2006.1627924
Publication status	Published - 22 Jan 2006
Event	19th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2006 - Istanbul, Turkey Duration: 22 Jan 2006 → 26 Jan 2006 Conference number: 19

Publication series

Name
Publisher	IEEE Computer Society Press
ISSN (Print)	1084-6999

Conference

Conference	19th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2006
Abbreviated title	MEMS
Country/Territory	Turkey
City	Istanbul
Period	22/01/06 → 26/01/06

Keywords

EWI-9188
METIS-248483
IR-66910

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

Access to Document

10.1109/MEMSYS.2006.1627924

Cite this

@inproceedings{dc2e247d6e78455489ea622f4060042e,

title = "Fabrication and characterization of an electrostatic contraction beams micromotor",

abstract = "We report on fabrication and experimental characterization of an electrostatic contraction beams motor that exhibits both reliable operation and high performance haracteristics. This electrostatic linear stepper micromotor is fabricated in a single polysilicon layer combining vertical trench isolation technology with standard surface micromachining. The entire motor, including two voltage-controlled clamps and eight pairs of contraction beams, fits in an area of 470 μm x 290 μm. Bidirectional stepping motion has been successfully demonstrated, generating a stroke of ± 70 μm by successively adding 10 nm steps. The motor was driven up to a cycling frequency of 80 kHz. An output force of 0.49 mN was measured for actuation voltages of 60 V on the beams and 50 V on the clamps. The motor was run for 160 hours at a cycling frequency of 10 kHz, generating nearly 5.8 billion steps.",

keywords = "EWI-9188, METIS-248483, IR-66910",

author = "Edin Sarajlic and Berenschot, {Johan W.} and Tas, {Niels Roelof} and H. Fujita and Krijnen, {Gijsbertus J.M.} and Elwenspoek, {Michael Curt}",

note = "http://ieeexplore.ieee.org/xpl/freeabs_all.jsp?arnumber=1627924 ; 19th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2006, MEMS ; Conference date: 22-01-2006 Through 26-01-2006",

year = "2006",

month = jan,

day = "22",

doi = "10.1109/MEMSYS.2006.1627924",

language = "English",

isbn = "0-7803-9475-5",

publisher = "IEEE",

pages = "814--817",

booktitle = "19th IEEE International Conference on MEMS 2006",

address = "United States",

}

Sarajlic, E, Berenschot, JW , Tas, NR, Fujita, H, Krijnen, GJM & Elwenspoek, MC 2006, Fabrication and characterization of an electrostatic contraction beams micromotor. in 19th IEEE International Conference on MEMS 2006. IEEE, Los Alamitos, pp. 814-817, 19th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2006, Istanbul, Turkey, 22/01/06. https://doi.org/10.1109/MEMSYS.2006.1627924

TY - GEN

T1 - Fabrication and characterization of an electrostatic contraction beams micromotor

AU - Sarajlic, Edin

AU - Berenschot, Johan W.

AU - Tas, Niels Roelof

AU - Fujita, H.

AU - Krijnen, Gijsbertus J.M.

AU - Elwenspoek, Michael Curt

N1 - Conference code: 19

PY - 2006/1/22

Y1 - 2006/1/22

N2 - We report on fabrication and experimental characterization of an electrostatic contraction beams motor that exhibits both reliable operation and high performance haracteristics. This electrostatic linear stepper micromotor is fabricated in a single polysilicon layer combining vertical trench isolation technology with standard surface micromachining. The entire motor, including two voltage-controlled clamps and eight pairs of contraction beams, fits in an area of 470 μm x 290 μm. Bidirectional stepping motion has been successfully demonstrated, generating a stroke of ± 70 μm by successively adding 10 nm steps. The motor was driven up to a cycling frequency of 80 kHz. An output force of 0.49 mN was measured for actuation voltages of 60 V on the beams and 50 V on the clamps. The motor was run for 160 hours at a cycling frequency of 10 kHz, generating nearly 5.8 billion steps.

AB - We report on fabrication and experimental characterization of an electrostatic contraction beams motor that exhibits both reliable operation and high performance haracteristics. This electrostatic linear stepper micromotor is fabricated in a single polysilicon layer combining vertical trench isolation technology with standard surface micromachining. The entire motor, including two voltage-controlled clamps and eight pairs of contraction beams, fits in an area of 470 μm x 290 μm. Bidirectional stepping motion has been successfully demonstrated, generating a stroke of ± 70 μm by successively adding 10 nm steps. The motor was driven up to a cycling frequency of 80 kHz. An output force of 0.49 mN was measured for actuation voltages of 60 V on the beams and 50 V on the clamps. The motor was run for 160 hours at a cycling frequency of 10 kHz, generating nearly 5.8 billion steps.

KW - EWI-9188

KW - METIS-248483

KW - IR-66910

U2 - 10.1109/MEMSYS.2006.1627924

DO - 10.1109/MEMSYS.2006.1627924

M3 - Conference contribution

SN - 0-7803-9475-5

SP - 814

EP - 817

BT - 19th IEEE International Conference on MEMS 2006

PB - IEEE

CY - Los Alamitos

T2 - 19th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2006

Y2 - 22 January 2006 through 26 January 2006

ER -

Fabrication and characterization of an electrostatic contraction beams micromotor

Abstract

Publication series

Conference

Keywords

UN SDGs

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