Fabrication and characterization of an electrostatic contraction beams micromotor

Edin Sarajlic, Johan W. Berenschot, Niels Roelof Tas, H. Fujita, Gijsbertus J.M. Krijnen, Michael Curt Elwenspoek

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    7 Citations (Scopus)
    3 Downloads (Pure)

    Abstract

    We report on fabrication and experimental characterization of an electrostatic contraction beams motor that exhibits both reliable operation and high performance haracteristics. This electrostatic linear stepper micromotor is fabricated in a single polysilicon layer combining vertical trench isolation technology with standard surface micromachining. The entire motor, including two voltage-controlled clamps and eight pairs of contraction beams, fits in an area of 470 μm x 290 μm. Bidirectional stepping motion has been successfully demonstrated, generating a stroke of ± 70 μm by successively adding 10 nm steps. The motor was driven up to a cycling frequency of 80 kHz. An output force of 0.49 mN was measured for actuation voltages of 60 V on the beams and 50 V on the clamps. The motor was run for 160 hours at a cycling frequency of 10 kHz, generating nearly 5.8 billion steps.
    Original languageEnglish
    Title of host publication19th IEEE International Conference on MEMS 2006
    Place of PublicationLos Alamitos
    PublisherIEEE Computer Society
    Pages814-817
    Number of pages4
    ISBN (Print)0-7803-9475-5
    DOIs
    Publication statusPublished - 22 Jan 2006
    Event19th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2006 - Istanbul, Turkey
    Duration: 22 Jan 200626 Jan 2006
    Conference number: 19

    Publication series

    Name
    PublisherIEEE Computer Society Press
    ISSN (Print)1084-6999

    Conference

    Conference19th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2006
    Abbreviated titleMEMS
    CountryTurkey
    CityIstanbul
    Period22/01/0626/01/06

    Keywords

    • EWI-9188
    • METIS-248483
    • IR-66910

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  • Cite this

    Sarajlic, E., Berenschot, J. W., Tas, N. R., Fujita, H., Krijnen, G. J. M., & Elwenspoek, M. C. (2006). Fabrication and characterization of an electrostatic contraction beams micromotor. In 19th IEEE International Conference on MEMS 2006 (pp. 814-817). Los Alamitos: IEEE Computer Society. https://doi.org/10.1109/MEMSYS.2006.1627924