Fabrication and characterization of an electrostatic contraction beams micromotor

Edin Sarajlic, Johan W. Berenschot, Niels Roelof Tas, H. Fujita, Gijsbertus J.M. Krijnen, Michael Curt Elwenspoek

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

    8 Citations (Scopus)
    13 Downloads (Pure)

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    Engineering