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Fabrication and characterization of free-standing, high-line-density transmission gratings for the vacuum UV to soft X-ray range
S.J. Goh*, H.M.J. Bastiaens, B. Vratzov, Q. Huang, F. Bijkerk, K.J. Boller
*Corresponding author for this work
Research output: Contribution to journal › Article › Academic › peer-review
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