Fabrication and characterization of high-temperature microreactors with thin film heater and sensor patterns in silicon nitride tubes

Roald M. Tiggelaar, Johan W. Berenschot, J.H. de Boer, Remco G.P. Sanders, Johannes G.E. Gardeniers, R.E. Oosterbroek, Albert van den Berg, Michael Curt Elwenspoek

Research output: Contribution to journal › Article › Academic › peer-review

39 Citations (Scopus)
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