Fabrication and characterization of MEMS based wafer-scale palladium-silver alloy membranes for hydrogen separation and hydrogenation/dehydrogenation reactions

D.H. Tong, F.C. Gielens, Johan W. Berenschot, Meint J. de Boer, Johannes G.E. Gardeniers, W. Nijdam, C.J.M. van Rijn, Michael Curt Elwenspoek

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In this paper, a MEMS based wafer-scale palladium - silver alloy membrane (MWSPdAgM) is presented. This membrane has the potential to be used for hydrogen purification and other applications [1]. A palladium-silver alloy layer (pd-Ag) was prepared by co-sputtering. The thin Pd-Ag alloy has high hydrogen selectivity, high permeation rate as well as high mechanical and chemical stability. Typical flow rates of 0.5 mol H2 /m2.s have been measured with a minimal selectivity of 550 for H2/N2. Anodic bonding of thick glass to silicon was used to package the membrane and create a very robust module. The membrane has high mechanical strength and can withstand pressures up to 4 bars at room temperature. The presented fabrication method allows the development of a module for industrial applications that consists of a stack with a large number of glass/membrane plates.
Original languageEnglish
Title of host publicationTechnical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems
Number of pages4
ISBN (Print)0-7803-7185-2
Publication statusPublished - 20 Jan 2002
Event15th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2002 - Las Vegas, United States
Duration: 20 Jan 200224 Jan 2002
Conference number: 15


Conference15th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2002
Abbreviated titleMEMS
Country/TerritoryUnited States
CityLas Vegas


  • EWI-12733
  • IR-43325
  • METIS-206359

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