Fabrication and characterization of MEMS based wafer-scale palladium-silver alloy membranes for hydrogen separation and hydrogenation/dehydrogenation reactions

D.H. Tong, F.C. Gielens, Johan W. Berenschot, Meint J. de Boer, Johannes G.E. Gardeniers, W. Nijdam, C.J.M. van Rijn, Michael Curt Elwenspoek

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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Physics & Astronomy