Fabrication and doping methods for silicon nano- and micropillar arrays for solar cell applications: a review

R. Elbersen, Wouter Jan, Cornelis Vijselaar, Roald M. Tiggelaar, Johannes G.E. Gardeniers, Jurriaan Huskens

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Silicon is one of the main components of commercial solar cells and is used in many other solar-light-harvesting devices. The overall efficiency of these devices can be increased by the use of structured surfaces that contain nanometer- to micrometer-sized pillars with radial p/n junctions. High densities of such structures greatly enhance the light-absorbing properties of the device, whereas the 3D p/n junction geometry shortens the diffusion length of minority carriers and diminishes recombination. Due to the vast silicon nano- and microfabrication toolbox that exists nowadays, many versatile methods for the preparation of such highly structured samples are available. Furthermore, the formation of p/n junctions on structured surfaces is possible by a variety of doping techniques, in large part transferred from microelectronic circuit technology. The right choice of doping method, to achieve good control of junction depth and doping level, can contribute to an improvement of the overall efficiency that can be obtained in devices for energy applications. A review of the state-of-the-art of the fabrication and doping of silicon micro and nanopillars is presented here, as well as of the analysis of the properties and geometry of thus-formed 3D-structured p/n junctions.
Original languageUndefined
Pages (from-to)6781-6796
Number of pages16
JournalAdvanced materials
Publication statusPublished - 2015


  • IR-99865
  • METIS-314386

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