Fabrication and interfacing of nanochannel devices for single-molecule studies

H.T.H. Hoang Thi Hanh, Gezina M.J. Segers-Nolten, Johan W. Berenschot, Meint J. de Boer, Niels Roelof Tas, J. Haneveld, Michael Curt Elwenspoek

Research output: Contribution to journal › Article › Academic › peer-review

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Abstract

Nanochannel devices have been fabricated using standard micromachining techniques such as optical lithography, deposition and etching. 1D nanochannels with thin glass capping and through-wafer inlet/outlet ports were constructed. 2D nanochannels have been made transparent by oxidation of polysilicon channel wall for optical detection and these fragile channels were successfully connected to macro inlet ports. The interfacing from the macro world to the nanochannels was especially designed for optical observation of filling liquid inside nanochannels using an inverted microscope. Toward single-molecule studies, individual quantum dots were visualized in 150 nm height 1D nanochannels. The potential of 2D nanochannels for single-molecule studies was shown from a filling experiment with a fluorescent dye solution.
Original languageUndefined
Article number065017
Pages (from-to)1-10
Number of pages10
JournalJournal of micromechanics and microengineering
Volume19
Issue number6
DOIs
Publication statusPublished - 20 May 2009

Keywords

  • EWI-16080
  • IR-67993
  • METIS-264034

Cite this

Hoang Thi Hanh, H.T.H. ; Segers-Nolten, Gezina M.J. ; Berenschot, Johan W. ; de Boer, Meint J. ; Tas, Niels Roelof ; Haneveld, J. ; Elwenspoek, Michael Curt. / Fabrication and interfacing of nanochannel devices for single-molecule studies. In: Journal of micromechanics and microengineering. 2009 ; Vol. 19, No. 6. pp. 1-10.
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title = "Fabrication and interfacing of nanochannel devices for single-molecule studies",
abstract = "Nanochannel devices have been fabricated using standard micromachining techniques such as optical lithography, deposition and etching. 1D nanochannels with thin glass capping and through-wafer inlet/outlet ports were constructed. 2D nanochannels have been made transparent by oxidation of polysilicon channel wall for optical detection and these fragile channels were successfully connected to macro inlet ports. The interfacing from the macro world to the nanochannels was especially designed for optical observation of filling liquid inside nanochannels using an inverted microscope. Toward single-molecule studies, individual quantum dots were visualized in 150 nm height 1D nanochannels. The potential of 2D nanochannels for single-molecule studies was shown from a filling experiment with a fluorescent dye solution.",
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author = "{Hoang Thi Hanh}, H.T.H. and Segers-Nolten, {Gezina M.J.} and Berenschot, {Johan W.} and {de Boer}, {Meint J.} and Tas, {Niels Roelof} and J. Haneveld and Elwenspoek, {Michael Curt}",
note = "10.1088/0960-1317/19/6/065017",
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day = "20",
doi = "10.1088/0960-1317/19/6/065017",
language = "Undefined",
volume = "19",
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journal = "Journal of micromechanics and microengineering",
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Hoang Thi Hanh, HTH, Segers-Nolten, GMJ, Berenschot, JW, de Boer, MJ, Tas, NR, Haneveld, J & Elwenspoek, MC 2009, 'Fabrication and interfacing of nanochannel devices for single-molecule studies', Journal of micromechanics and microengineering, vol. 19, no. 6, 065017, pp. 1-10. https://doi.org/10.1088/0960-1317/19/6/065017

Fabrication and interfacing of nanochannel devices for single-molecule studies. / Hoang Thi Hanh, H.T.H.; Segers-Nolten, Gezina M.J.; Berenschot, Johan W.; de Boer, Meint J.; Tas, Niels Roelof; Haneveld, J.; Elwenspoek, Michael Curt.

In: Journal of micromechanics and microengineering, Vol. 19, No. 6, 065017, 20.05.2009, p. 1-10.

Research output: Contribution to journal › Article › Academic › peer-review

TY - JOUR

T1 - Fabrication and interfacing of nanochannel devices for single-molecule studies

AU - Hoang Thi Hanh, H.T.H.

AU - Segers-Nolten, Gezina M.J.

AU - Berenschot, Johan W.

AU - de Boer, Meint J.

AU - Tas, Niels Roelof

AU - Haneveld, J.

AU - Elwenspoek, Michael Curt

N1 - 10.1088/0960-1317/19/6/065017

PY - 2009/5/20

Y1 - 2009/5/20

N2 - Nanochannel devices have been fabricated using standard micromachining techniques such as optical lithography, deposition and etching. 1D nanochannels with thin glass capping and through-wafer inlet/outlet ports were constructed. 2D nanochannels have been made transparent by oxidation of polysilicon channel wall for optical detection and these fragile channels were successfully connected to macro inlet ports. The interfacing from the macro world to the nanochannels was especially designed for optical observation of filling liquid inside nanochannels using an inverted microscope. Toward single-molecule studies, individual quantum dots were visualized in 150 nm height 1D nanochannels. The potential of 2D nanochannels for single-molecule studies was shown from a filling experiment with a fluorescent dye solution.

AB - Nanochannel devices have been fabricated using standard micromachining techniques such as optical lithography, deposition and etching. 1D nanochannels with thin glass capping and through-wafer inlet/outlet ports were constructed. 2D nanochannels have been made transparent by oxidation of polysilicon channel wall for optical detection and these fragile channels were successfully connected to macro inlet ports. The interfacing from the macro world to the nanochannels was especially designed for optical observation of filling liquid inside nanochannels using an inverted microscope. Toward single-molecule studies, individual quantum dots were visualized in 150 nm height 1D nanochannels. The potential of 2D nanochannels for single-molecule studies was shown from a filling experiment with a fluorescent dye solution.

KW - EWI-16080

KW - IR-67993

KW - METIS-264034

U2 - 10.1088/0960-1317/19/6/065017

DO - 10.1088/0960-1317/19/6/065017

M3 - Article

VL - 19

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JO - Journal of micromechanics and microengineering

JF - Journal of micromechanics and microengineering

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Hoang Thi Hanh HTH, Segers-Nolten GMJ, Berenschot JW, de Boer MJ, Tas NR, Haneveld J et al. Fabrication and interfacing of nanochannel devices for single-molecule studies. Journal of micromechanics and microengineering. 2009 May 20;19(6):1-10. 065017. https://doi.org/10.1088/0960-1317/19/6/065017

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