Fabrication and interfacing of nanochannel devices for single-molecule studies

H.T.H. Hoang Thi Hanh, Gezina M.J. Segers-Nolten, Johan W. Berenschot, Meint J. de Boer, Niels Roelof Tas, J. Haneveld, Michael Curt Elwenspoek

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Nanochannel devices have been fabricated using standard micromachining techniques such as optical lithography, deposition and etching. 1D nanochannels with thin glass capping and through-wafer inlet/outlet ports were constructed. 2D nanochannels have been made transparent by oxidation of polysilicon channel wall for optical detection and these fragile channels were successfully connected to macro inlet ports. The interfacing from the macro world to the nanochannels was especially designed for optical observation of filling liquid inside nanochannels using an inverted microscope. Toward single-molecule studies, individual quantum dots were visualized in 150 nm height 1D nanochannels. The potential of 2D nanochannels for single-molecule studies was shown from a filling experiment with a fluorescent dye solution.
Original languageUndefined
Article number065017
Pages (from-to)1-10
Number of pages10
JournalJournal of micromechanics and microengineering
Issue number6
Publication statusPublished - 20 May 2009


  • EWI-16080
  • IR-67993
  • METIS-264034

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