Abstract
Nanochannel devices have been fabricated using standard micromachining techniques such as
optical lithography, deposition and etching. 1D nanochannels with thin glass capping and
through-wafer inlet/outlet ports were constructed. 2D nanochannels have been made
transparent by oxidation of polysilicon channel wall for optical detection and these fragile
channels were successfully connected to macro inlet ports. The interfacing from the macro
world to the nanochannels was especially designed for optical observation of filling liquid
inside nanochannels using an inverted microscope. Toward single-molecule studies, individual
quantum dots were visualized in 150 nm height 1D nanochannels. The potential of 2D
nanochannels for single-molecule studies was shown from a filling experiment with a
fluorescent dye solution.
Original language | Undefined |
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Article number | 065017 |
Pages (from-to) | 1-10 |
Number of pages | 10 |
Journal | Journal of micromechanics and microengineering |
Volume | 19 |
Issue number | 6 |
DOIs | |
Publication status | Published - 20 May 2009 |
Keywords
- EWI-16080
- IR-67993
- METIS-264034