Fabrication and mechanical testing of glass chips for high-pressure synthetic or analytical chemistry

R.E. Oosterbroek, D.C. Hermes, M. Kakuta, F. Benito-Lopez, J.G.E. Gardeniers (Corresponding Author), W. Verboom, A. van den Berg, D.N. Reinhoudt

Research output: Contribution to journalConference articleAcademicpeer-review

19 Citations (Scopus)

Abstract

The pressure strength of microfluidics glass chips for high-pressure chemistry has been examined. Internal pressures up to 320 bar have been measured, although variations are substantial. Long annealing steps at high temperatures did not show any improvement, but smoothening the powder blasted channel walls by isotropic etching did. Although macro cracks are observed at the bond interface it is believed that the formation of micro cracks in the channel wall and stress concentrations due to sharp corners in the channel cross-section geometry strongly limits the maximum applicable pressures.
Original languageEnglish
Pages (from-to)450-454
Number of pages5
JournalMicrosystem technologies
Volume12
Issue number5
DOIs
Publication statusPublished - Mar 2006
EventWafer-Bonding Workshop for MEMS Technologies, WBW-MEMS 2004 - Halle, Germany
Duration: 11 Oct 200412 Oct 2004

Fingerprint

analytical chemistry
Mechanical testing
chips
chemistry
Fabrication
Glass
fabrication
glass
cracks
Chemical analysis
internal pressure
stress concentration
Cracks
Microfluidics
etching
Powders
Interfaces (computer)
Macros
Stress concentration
Etching

Keywords

  • Direct wafer bonding
  • High pressure
  • Microreactors
  • Lab-on-a-chip

Cite this

@article{87c432a06eb041ee94f284d8098ebb0f,
title = "Fabrication and mechanical testing of glass chips for high-pressure synthetic or analytical chemistry",
abstract = "The pressure strength of microfluidics glass chips for high-pressure chemistry has been examined. Internal pressures up to 320 bar have been measured, although variations are substantial. Long annealing steps at high temperatures did not show any improvement, but smoothening the powder blasted channel walls by isotropic etching did. Although macro cracks are observed at the bond interface it is believed that the formation of micro cracks in the channel wall and stress concentrations due to sharp corners in the channel cross-section geometry strongly limits the maximum applicable pressures.",
keywords = "Direct wafer bonding, High pressure, Microreactors, Lab-on-a-chip",
author = "R.E. Oosterbroek and D.C. Hermes and M. Kakuta and F. Benito-Lopez and J.G.E. Gardeniers and W. Verboom and {van den Berg}, A. and D.N. Reinhoudt",
year = "2006",
month = "3",
doi = "10.1007/s00542-005-0043-5",
language = "English",
volume = "12",
pages = "450--454",
journal = "Microsystem technologies",
issn = "0946-7076",
publisher = "Springer",
number = "5",

}

Fabrication and mechanical testing of glass chips for high-pressure synthetic or analytical chemistry. / Oosterbroek, R.E.; Hermes, D.C.; Kakuta, M.; Benito-Lopez, F.; Gardeniers, J.G.E. (Corresponding Author); Verboom, W.; van den Berg, A.; Reinhoudt, D.N.

In: Microsystem technologies, Vol. 12, No. 5, 03.2006, p. 450-454.

Research output: Contribution to journalConference articleAcademicpeer-review

TY - JOUR

T1 - Fabrication and mechanical testing of glass chips for high-pressure synthetic or analytical chemistry

AU - Oosterbroek, R.E.

AU - Hermes, D.C.

AU - Kakuta, M.

AU - Benito-Lopez, F.

AU - Gardeniers, J.G.E.

AU - Verboom, W.

AU - van den Berg, A.

AU - Reinhoudt, D.N.

PY - 2006/3

Y1 - 2006/3

N2 - The pressure strength of microfluidics glass chips for high-pressure chemistry has been examined. Internal pressures up to 320 bar have been measured, although variations are substantial. Long annealing steps at high temperatures did not show any improvement, but smoothening the powder blasted channel walls by isotropic etching did. Although macro cracks are observed at the bond interface it is believed that the formation of micro cracks in the channel wall and stress concentrations due to sharp corners in the channel cross-section geometry strongly limits the maximum applicable pressures.

AB - The pressure strength of microfluidics glass chips for high-pressure chemistry has been examined. Internal pressures up to 320 bar have been measured, although variations are substantial. Long annealing steps at high temperatures did not show any improvement, but smoothening the powder blasted channel walls by isotropic etching did. Although macro cracks are observed at the bond interface it is believed that the formation of micro cracks in the channel wall and stress concentrations due to sharp corners in the channel cross-section geometry strongly limits the maximum applicable pressures.

KW - Direct wafer bonding

KW - High pressure

KW - Microreactors

KW - Lab-on-a-chip

U2 - 10.1007/s00542-005-0043-5

DO - 10.1007/s00542-005-0043-5

M3 - Conference article

VL - 12

SP - 450

EP - 454

JO - Microsystem technologies

JF - Microsystem technologies

SN - 0946-7076

IS - 5

ER -