Fabrication and mechanical testing of glass chips for high-pressure synthetic or analytical chemistry

R.E. Oosterbroek, D.C. Hermes, M. Kakuta, F. Benito-Lopez, J.G.E. Gardeniers (Corresponding Author), W. Verboom, A. van den Berg, D.N. Reinhoudt

Research output: Contribution to journalConference articleAcademicpeer-review

23 Citations (Scopus)

Abstract

The pressure strength of microfluidics glass chips for high-pressure chemistry has been examined. Internal pressures up to 320 bar have been measured, although variations are substantial. Long annealing steps at high temperatures did not show any improvement, but smoothening the powder blasted channel walls by isotropic etching did. Although macro cracks are observed at the bond interface it is believed that the formation of micro cracks in the channel wall and stress concentrations due to sharp corners in the channel cross-section geometry strongly limits the maximum applicable pressures.
Original languageEnglish
Pages (from-to)450-454
Number of pages5
JournalMicrosystem technologies
Volume12
Issue number5
DOIs
Publication statusPublished - Mar 2006
EventWafer-Bonding Workshop for MEMS Technologies, WBW-MEMS 2004 - Halle, Germany
Duration: 11 Oct 200412 Oct 2004

Keywords

  • Direct wafer bonding
  • High pressure
  • Microreactors
  • Lab-on-a-chip

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