Fabrication and packaging of integrated chemo-optical sensors

Rene Heideman, G.J. Veldhuis, E.W.H. Jager, Paul Lambeck

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    This paper describes the design and fabrication of a sensitive integrated chemo-optical sensor supplied with on-chip fiber-to-waveguide connectors. The sensor is designed for TE-polarized light with wavelength of 633 nm. The fiber-to-chip connectors are based on easily fabricated silicon V-grooves combined with a smooth sawcut. The sawcut is defining the channel waveguide endface. The sensor is based on a phase modulated Mach-Zehnder interferometer, using the electro-optic effect of the waveguiding material zinc oxide (ZnO). The fiber-to-chip connector units have a typical coupling efficiency of 0.1¿1%. The electro-optical voltage × length product V¿ is 15 ± 4 V cm at frequencies above 100 Hz. Preliminary experiments on the general (passive) sensor response showing its expected high sensitivity are discussed.
    Original languageUndefined
    Pages (from-to)234-240
    JournalSensors and actuators. B: Chemical
    Issue number1-3
    Publication statusPublished - 1996


    • METIS-111528
    • IR-14283

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