TY - JOUR
T1 - Fabrication, mechanical testing and application of high-pressure glass microreactor chips
AU - Tiggelaar, Roald M.
AU - Benito-Lopéz, Fernando
AU - Hermes, Dorothee C.
AU - Rathgen, Helmut
AU - Egberink, Richard J.M.
AU - Mugele, Frieder G.
AU - Reinhoudt, David
AU - van den Berg, Albert
AU - Verboom, Willem
AU - Gardeniers, Han J.G.E.
PY - 2007/7
Y1 - 2007/7
N2 - The design, fabrication and high-pressure performance of several in-plane fiber-based interface geometries to microreactor chips for high-pressure chemistry are discussed, and an application is presented. The main investigated design parameters are the geometry of the inlet/outlet structure, the manner in which top and bottom wafer are bonded and the way the inlets/outlets turn over into the microfluidic channels.
Destructive pressure experiments with H2O and liquid CO2 showed that the maximum pressure that the proposed inlet/outlet structures can withstand is in the range of 180–690 bar. The optimal geometry for high-pressure microreactor chips is a tubular structure that is etched with hydrofluoric acid (HF) and suitable for fibers with a diameter of 110 μm. These inlets/outlets can withstand pressures up to 690 bar. On the other hand, small powderblasted inlets/outlets that are smoothened with HF and with a sharp transition towards the flow channels are adequate for working pressures up to 300 bar.
Microreactor chips with tubular inlet/outlet geometries were used for studying the formation of the carbamic acid of N-benzylmethylamine and CO2. These chips could be used for pressures up to 400 bar without problems/failure, thereby showing that these micromachined microreactor chips are attractive tools for performing high-pressure chemistry in a fast and safe way.
AB - The design, fabrication and high-pressure performance of several in-plane fiber-based interface geometries to microreactor chips for high-pressure chemistry are discussed, and an application is presented. The main investigated design parameters are the geometry of the inlet/outlet structure, the manner in which top and bottom wafer are bonded and the way the inlets/outlets turn over into the microfluidic channels.
Destructive pressure experiments with H2O and liquid CO2 showed that the maximum pressure that the proposed inlet/outlet structures can withstand is in the range of 180–690 bar. The optimal geometry for high-pressure microreactor chips is a tubular structure that is etched with hydrofluoric acid (HF) and suitable for fibers with a diameter of 110 μm. These inlets/outlets can withstand pressures up to 690 bar. On the other hand, small powderblasted inlets/outlets that are smoothened with HF and with a sharp transition towards the flow channels are adequate for working pressures up to 300 bar.
Microreactor chips with tubular inlet/outlet geometries were used for studying the formation of the carbamic acid of N-benzylmethylamine and CO2. These chips could be used for pressures up to 400 bar without problems/failure, thereby showing that these micromachined microreactor chips are attractive tools for performing high-pressure chemistry in a fast and safe way.
KW - 2023 OA procedure
U2 - 10.1016/j.cej.2006.12.036
DO - 10.1016/j.cej.2006.12.036
M3 - Article
SN - 1385-8947
VL - 131
SP - 163
EP - 170
JO - Chemical Engineering Journal
JF - Chemical Engineering Journal
IS - 1-3
ER -