Fabrication method for microfluidic channels with circular cross section for micro-Coriolis mass flow sensor

Qihui Yu, Henk-Willem Veltkamp, Meint J. de Boer, Remco J. Wiegerink, Joost Conrad Lötters

    Research output: Contribution to conferencePaper

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    Abstract

    This paper presents a new fabrication method to realize a channel underneath the surface of a single silicon substrate for micro Coriolis flow sensing application, as well as other multiparameter systems, such as thermal flow sensors. It allows to fabricate channels with a nearly perfect circular cross section without bonding of two wafers. With this technology, problems such as leakage, deformation of channels due to pressure and temperature that affect the performance of micro Coriolis flow sensor can be reduced significantly. Moreover, it leaves only very little topography on the surface of substrate, hence integration of actuation and readout systems by metal deposition can still be followed easily afterwards.
    Original languageEnglish
    Pages103-105
    Number of pages3
    Publication statusPublished - 2 Oct 2019
    Event4th Conference on MicroFluidic Handling Systems, MFHS 2019 - De Kleine Willem, Enschede, Netherlands
    Duration: 2 Oct 20194 Oct 2019
    Conference number: 4
    https://www.mfhs2019.org/

    Conference

    Conference4th Conference on MicroFluidic Handling Systems, MFHS 2019
    Abbreviated titleMFHS 2019
    CountryNetherlands
    CityEnschede
    Period2/10/194/10/19
    Internet address

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