Fabrication method for microfluidic channels with circular cross section for micro-Coriolis mass flow sensor

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Abstract

This paper presents a new fabrication method to realize a channel underneath the surface of a single silicon substrate for micro Coriolis flow sensing application, as well as other multiparameter systems, such as thermal flow sensors. It allows to fabricate channels with a nearly perfect circular cross section without bonding of two wafers. With this technology, problems such as leakage, deformation of channels due to pressure and temperature that affect the performance of micro Coriolis flow sensor can be reduced significantly. Moreover, it leaves only very little topography on the surface of substrate, hence integration of actuation and readout systems by metal deposition can still be followed easily afterwards.
Original languageEnglish
Pages103-105
Number of pages3
Publication statusPublished - 2 Oct 2019
Event4th Conference on MicroFluidic Handling Systems, MFHS 2019 - De Kleine Willem, Enschede, Netherlands
Duration: 2 Oct 20194 Oct 2019
Conference number: 4
https://www.mfhs2019.org/

Conference

Conference4th Conference on MicroFluidic Handling Systems, MFHS 2019
Abbreviated titleMFHS 2019
CountryNetherlands
CityEnschede
Period2/10/194/10/19
Internet address

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Microfluidics
Readout systems
Fabrication
Sensors
Substrates
Topography
Silicon
Metals
Temperature
Hot Temperature

Cite this

Yu, Q., Veltkamp, H-W., de Boer, M. J., Wiegerink, R. J., & Lötters, J. C. (2019). Fabrication method for microfluidic channels with circular cross section for micro-Coriolis mass flow sensor. 103-105. Paper presented at 4th Conference on MicroFluidic Handling Systems, MFHS 2019, Enschede, Netherlands.
Yu, Qihui ; Veltkamp, Henk-Willem ; de Boer, Meint J. ; Wiegerink, Remco J. ; Lötters, Joost Conrad. / Fabrication method for microfluidic channels with circular cross section for micro-Coriolis mass flow sensor. Paper presented at 4th Conference on MicroFluidic Handling Systems, MFHS 2019, Enschede, Netherlands.3 p.
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title = "Fabrication method for microfluidic channels with circular cross section for micro-Coriolis mass flow sensor",
abstract = "This paper presents a new fabrication method to realize a channel underneath the surface of a single silicon substrate for micro Coriolis flow sensing application, as well as other multiparameter systems, such as thermal flow sensors. It allows to fabricate channels with a nearly perfect circular cross section without bonding of two wafers. With this technology, problems such as leakage, deformation of channels due to pressure and temperature that affect the performance of micro Coriolis flow sensor can be reduced significantly. Moreover, it leaves only very little topography on the surface of substrate, hence integration of actuation and readout systems by metal deposition can still be followed easily afterwards.",
author = "Qihui Yu and Henk-Willem Veltkamp and {de Boer}, {Meint J.} and Wiegerink, {Remco J.} and L{\"o}tters, {Joost Conrad}",
year = "2019",
month = "10",
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language = "English",
pages = "103--105",
note = "4th Conference on MicroFluidic Handling Systems, MFHS 2019, MFHS 2019 ; Conference date: 02-10-2019 Through 04-10-2019",
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Yu, Q, Veltkamp, H-W, de Boer, MJ, Wiegerink, RJ & Lötters, JC 2019, 'Fabrication method for microfluidic channels with circular cross section for micro-Coriolis mass flow sensor' Paper presented at 4th Conference on MicroFluidic Handling Systems, MFHS 2019, Enschede, Netherlands, 2/10/19 - 4/10/19, pp. 103-105.

Fabrication method for microfluidic channels with circular cross section for micro-Coriolis mass flow sensor. / Yu, Qihui ; Veltkamp, Henk-Willem ; de Boer, Meint J.; Wiegerink, Remco J.; Lötters, Joost Conrad.

2019. 103-105 Paper presented at 4th Conference on MicroFluidic Handling Systems, MFHS 2019, Enschede, Netherlands.

Research output: Contribution to conferencePaperAcademic

TY - CONF

T1 - Fabrication method for microfluidic channels with circular cross section for micro-Coriolis mass flow sensor

AU - Yu, Qihui

AU - Veltkamp, Henk-Willem

AU - de Boer, Meint J.

AU - Wiegerink, Remco J.

AU - Lötters, Joost Conrad

PY - 2019/10/2

Y1 - 2019/10/2

N2 - This paper presents a new fabrication method to realize a channel underneath the surface of a single silicon substrate for micro Coriolis flow sensing application, as well as other multiparameter systems, such as thermal flow sensors. It allows to fabricate channels with a nearly perfect circular cross section without bonding of two wafers. With this technology, problems such as leakage, deformation of channels due to pressure and temperature that affect the performance of micro Coriolis flow sensor can be reduced significantly. Moreover, it leaves only very little topography on the surface of substrate, hence integration of actuation and readout systems by metal deposition can still be followed easily afterwards.

AB - This paper presents a new fabrication method to realize a channel underneath the surface of a single silicon substrate for micro Coriolis flow sensing application, as well as other multiparameter systems, such as thermal flow sensors. It allows to fabricate channels with a nearly perfect circular cross section without bonding of two wafers. With this technology, problems such as leakage, deformation of channels due to pressure and temperature that affect the performance of micro Coriolis flow sensor can be reduced significantly. Moreover, it leaves only very little topography on the surface of substrate, hence integration of actuation and readout systems by metal deposition can still be followed easily afterwards.

M3 - Paper

SP - 103

EP - 105

ER -

Yu Q, Veltkamp H-W, de Boer MJ, Wiegerink RJ, Lötters JC. Fabrication method for microfluidic channels with circular cross section for micro-Coriolis mass flow sensor. 2019. Paper presented at 4th Conference on MicroFluidic Handling Systems, MFHS 2019, Enschede, Netherlands.