Fabrication of 1d nanochannels with thin glass wafers for single molecule studies

H.T.H. Hoang Thi Hanh, I. Segers-Nolten, Gezina M.J. Segers-Nolten, Niels Roelof Tas, Meint J. de Boer, Vinod Subramaniam, Michael Curt Elwenspoek

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1D nanochannels are fabricated by direct bonding between the silicon wafer containing the nanochannels, microchannels, access holes and the blank thin glass of 170 µm thickness. The thin glass wafers are used as channel covers because of their appropriate thickness for use with coverglass corrected water immersion lenses. As the nanochannel chips are used on an inverted microscope, access holes are created in the silicon wafer so that polyimide is good selection for protection during deep etching of the macro holes. Fabricated nanochannels with 50 nm depth were successfully filled with low concentration of solutions Alexa 488 could be observed through fluorescence microscopy. These nanochannels are promising for mobility studies of single molecules such as quantum dots.
Original languageUndefined
Title of host publicationTechnical Proceedings of the 2007 NSTI Nanotechnology Conference and Trade Show
Place of PublicationCambridge, MA USA
Number of pages4
ISBN (Print)1-4200-6184-4
Publication statusPublished - 2007
Event2007 NSTI Nanotechnology Conference and Trade Show, Nanotech 2007 - Santa Clara, United States
Duration: 20 May 200724 May 2007

Publication series

NumberSTW 200709


Other2007 NSTI Nanotechnology Conference and Trade Show, Nanotech 2007
Abbreviated titleNanotech
Country/TerritoryUnited States
CitySanta Clara
Internet address


  • EWI-11272
  • METIS-245744
  • IR-64430

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