Fabrication of 3D nanowire frames by conventional micromachining technology

Edin Sarajlic, Johan W. Berenschot, Gijsbertus J.M. Krijnen, Michael Curt Elwenspoek

    Research output: Contribution to conferencePoster

    Original languageUndefined
    Pages-
    Publication statusPublished - 30 Sep 2004
    EventMESA+ Day 2004 - Cinestar, Enschede, Netherlands
    Duration: 30 Sep 200430 Sep 2004

    Conference

    ConferenceMESA+ Day 2004
    CountryNetherlands
    CityEnschede
    Period30/09/0430/09/04
    Other(MESA+ Dag/Meeting)

    Keywords

    • METIS-219991

    Cite this

    Sarajlic, E., Berenschot, J. W., Krijnen, G. J. M., & Elwenspoek, M. C. (2004). Fabrication of 3D nanowire frames by conventional micromachining technology. -. Poster session presented at MESA+ Day 2004, Enschede, Netherlands.