Fabrication of 3d nanowire frames by conventional micromachining technology

Edin Sarajlic; Johan W. Berenschot; Gijsbertus J.M. Krijnen; Michael Curt Elwenspoek

doi:10.1109/SENSOR.2005.1496350

Fabrication of 3d nanowire frames by conventional micromachining technology

Edin Sarajlic
, Johan W. Berenschot
, Gijsbertus J.M. Krijnen
, Michael Curt Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

20 Citations (Scopus)

333 Downloads (Pure)

Abstract

We report on a simple parallel processing method capable of producing addressable three-dimensional (3D) nanometer-sized structures, such as wires, wire frames and dots. The method, which is fully compatible with standard micromachining, employs isotropic removal of conformally deposited material onto a prepared template, to form nanostructures in the concave corners of the template. The process results in well-defined nanometer scale structures with exact position and spatial arrangement fully determined by the template. An etching mask with nanometer size features and a nanowire pyramid on a freestanding cantilever have been successfully fabricated, demonstrating the feasibility and potential of this technology

Original language	Undefined
Title of host publication	Proceedings of the 13th International Conference on Solid-State Sensors, Actuators and Microsystems 2005
Place of Publication	Los Alamitos
Publisher	IEEE
Pages	27-30
Number of pages	4
ISBN (Print)	0-7803-8994-8
DOIs	https://doi.org/10.1109/SENSOR.2005.1496350
Publication status	Published - Jun 2005
Event	13th International Conferences on Solid-State Sensors, Actuators and Mircosystems, TRANSDUCERS 2005 - Seoul, Korea, Republic of Duration: 5 Jun 2005 → 9 Jun 2005 Conference number: 13

Publication series

Name
Publisher	IEEE
Number	05TH8791
Volume	1

Conference

Conference	13th International Conferences on Solid-State Sensors, Actuators and Mircosystems, TRANSDUCERS 2005
Abbreviated title	TRANSDUCERS 2005
Country/Territory	Korea, Republic of
City	Seoul
Period	5/06/05 → 9/06/05

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 9 Industry, Innovation, and Infrastructure

Keywords

EWI-10274
METIS-224196
IR-52577

Access to Document

10.1109/SENSOR.2005.1496350

Cite this

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title = "Fabrication of 3d nanowire frames by conventional micromachining technology",

abstract = "We report on a simple parallel processing method capable of producing addressable three-dimensional (3D) nanometer-sized structures, such as wires, wire frames and dots. The method, which is fully compatible with standard micromachining, employs isotropic removal of conformally deposited material onto a prepared template, to form nanostructures in the concave corners of the template. The process results in well-defined nanometer scale structures with exact position and spatial arrangement fully determined by the template. An etching mask with nanometer size features and a nanowire pyramid on a freestanding cantilever have been successfully fabricated, demonstrating the feasibility and potential of this technology",

keywords = "EWI-10274, METIS-224196, IR-52577",

author = "Edin Sarajlic and Berenschot, \{Johan W.\} and Krijnen, \{Gijsbertus J.M.\} and Elwenspoek, \{Michael Curt\}",

year = "2005",

month = jun,

doi = "10.1109/SENSOR.2005.1496350",

language = "Undefined",

isbn = "0-7803-8994-8",

publisher = "IEEE",

number = "05TH8791",

pages = "27--30",

booktitle = "Proceedings of the 13th International Conference on Solid-State Sensors, Actuators and Microsystems 2005",

address = "United States",

note = "13th International Conferences on Solid-State Sensors, Actuators and Mircosystems, TRANSDUCERS 2005 ; Conference date: 05-06-2005 Through 09-06-2005",

}

Sarajlic, E, Berenschot, JW , Krijnen, GJM & Elwenspoek, MC 2005, Fabrication of 3d nanowire frames by conventional micromachining technology. in Proceedings of the 13th International Conference on Solid-State Sensors, Actuators and Microsystems 2005. IEEE, Los Alamitos, pp. 27-30, 13th International Conferences on Solid-State Sensors, Actuators and Mircosystems, TRANSDUCERS 2005, Seoul, Korea, Republic of, 5/06/05. https://doi.org/10.1109/SENSOR.2005.1496350

Fabrication of 3d nanowire frames by conventional micromachining technology. / Sarajlic, Edin; Berenschot, Johan W.; Krijnen, Gijsbertus J.M. et al.
Proceedings of the 13th International Conference on Solid-State Sensors, Actuators and Microsystems 2005. Los Alamitos: IEEE, 2005. p. 27-30.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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AU - Krijnen, Gijsbertus J.M.

AU - Elwenspoek, Michael Curt

N1 - Conference code: 13

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N2 - We report on a simple parallel processing method capable of producing addressable three-dimensional (3D) nanometer-sized structures, such as wires, wire frames and dots. The method, which is fully compatible with standard micromachining, employs isotropic removal of conformally deposited material onto a prepared template, to form nanostructures in the concave corners of the template. The process results in well-defined nanometer scale structures with exact position and spatial arrangement fully determined by the template. An etching mask with nanometer size features and a nanowire pyramid on a freestanding cantilever have been successfully fabricated, demonstrating the feasibility and potential of this technology

AB - We report on a simple parallel processing method capable of producing addressable three-dimensional (3D) nanometer-sized structures, such as wires, wire frames and dots. The method, which is fully compatible with standard micromachining, employs isotropic removal of conformally deposited material onto a prepared template, to form nanostructures in the concave corners of the template. The process results in well-defined nanometer scale structures with exact position and spatial arrangement fully determined by the template. An etching mask with nanometer size features and a nanowire pyramid on a freestanding cantilever have been successfully fabricated, demonstrating the feasibility and potential of this technology

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KW - METIS-224196

KW - IR-52577

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BT - Proceedings of the 13th International Conference on Solid-State Sensors, Actuators and Microsystems 2005

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CY - Los Alamitos

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