Fabrication of a micro cryogenic cooler using MEMS-technology

P.P.M. Lerou, G.C.F. Venhorst, C.F. Berends, T.T. Veenstra, M. Blom, J.F. Burger, H.J.M. ter Brake, H. Rogalla

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This paper describes the design and production process of a variety of reliable micro cryogenic coolers. The different cold stages are based on an optimized design found during a study which was done to maximize the cold-stage effectiveness. Typical cold-stage dimensions are 30 × 2 × 0.5 mm with an expected net cooling power varying from 10 mW to 20 mW at a tip temperature of 96 K. A cold stage consists of a stack of three fusion bonded D263T glass wafers. The production process has 7 lithography steps and roughly 100 process steps. In order to determine the maximum bend, shear and bond stresses inside a 175 µm thick D263T glass wafer, several pressure tests were performed.
Original languageEnglish
Pages (from-to)1919-1925
Number of pages7
JournalJournal of micromechanics and microengineering
Publication statusPublished - 2006



  • IR-74335
  • METIS-233385

Cite this

Lerou, P. P. M., Venhorst, G. C. F., Berends, C. F., Veenstra, T. T., Blom, M., Burger, J. F., ... Rogalla, H. (2006). Fabrication of a micro cryogenic cooler using MEMS-technology. Journal of micromechanics and microengineering, 16, 1919-1925. https://doi.org/10.1088/0960-1317/16/10/002