Original language | Undefined |
---|---|
Pages (from-to) | S81-S84 |
Number of pages | 4 |
Journal | Journal of micromechanics and microengineering |
Volume | 13 |
Publication status | Published - 2003 |
Keywords
- METIS-212616
Stefan Schlautmann, G.A.J. Besselink, R. Prabhu, Richardus B.M. Schasfoort
Research output: Contribution to journal › Article › Academic › peer-review
Original language | Undefined |
---|---|
Pages (from-to) | S81-S84 |
Number of pages | 4 |
Journal | Journal of micromechanics and microengineering |
Volume | 13 |
Publication status | Published - 2003 |