Abstract
The application of the sacrificial layer technique for the fabrication of a subminiature silicon condenser microphone with a plasma-enhanced chemical vapor deposited silicon nitride diaphragm has been investigated. Square diaphragms with dimensions from 0.6 to 2.6 mm and a thickness of 1 ¿m have been realized. Measurements on a microphone with a 2×2 mm diaphragm and a 1 ¿m airgap have shown that a sensitivity of 1.4 mV/Pa for low frequencies can be achieved with a low bias voltage (-2 V). The sensitivity decreases for high frequencies. This effect is probably due to the small airgap. Therefore, microphones with wider airgaps have to be developed to achieve a flat frequency response for the entire audio frequency range
Original language | English |
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Title of host publication | Transducers '91 |
Subtitle of host publication | 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers |
Place of Publication | Piscataway, NJ |
Publisher | IEEE |
Pages | 408-411 |
Number of pages | 4 |
ISBN (Print) | 9780879425852 |
DOIs | |
Publication status | Published - 24 Jun 1991 |
Event | 1991 International Conference on Solid-State Sensors and Actuators, TRANSDUCERS 1991 - San Francisco, United States Duration: 24 Jun 1991 → 27 Jun 1991 |
Conference
Conference | 1991 International Conference on Solid-State Sensors and Actuators, TRANSDUCERS 1991 |
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Abbreviated title | TRANSDUCERS '91 |
Country/Territory | United States |
City | San Francisco |
Period | 24/06/91 → 27/06/91 |