Fabrication of an active nanostencil with integrated microshutters

R.W. Tjerkstra, P. Ekkels, Gijsbertus J.M. Krijnen, S. Egger, Johan W. Berenschot, Kechun Ma, J.P. Brugger

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    4 Citations (Scopus)
    52 Downloads (Pure)

    Abstract

    An active nanostencil, consisting of a thin (200 nm) silicon nitride membrane with attached polysilicon microactuators that can be used to dynamically open and/or close holes in the silicon nitride membrane, is presented. This nanostencil can be used as a shadow mask in an evaporation setup. Main features of the nanostencil are the absence of sacrificial oxide in the final product, strengthening of the membrane by a polysilicon hexagonal structure that is attached directly to the membrane and the use of low-doped regions in the polysilicon to separate the stator and rotor electrically.
    Original languageUndefined
    Title of host publicationTRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003
    Place of PublicationLos Alamitos
    PublisherIEEE Computer Society
    Pages1651-1654
    Number of pages4
    ISBN (Print)0-7803-7731-1
    Publication statusPublished - Jun 2003
    Event12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Boston, United States
    Duration: 8 Jun 200312 Jun 2003
    Conference number: 12

    Publication series

    Name
    PublisherIEEE
    Volume2

    Conference

    Conference12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003
    Abbreviated titleTRANSDUCERS 2003
    CountryUnited States
    CityBoston
    Period8/06/0312/06/03

    Keywords

    • METIS-215248
    • EWI-11159
    • IR-46524

    Cite this

    Tjerkstra, R. W., Ekkels, P., Krijnen, G. J. M., Egger, S., Berenschot, J. W., Ma, K., & Brugger, J. P. (2003). Fabrication of an active nanostencil with integrated microshutters. In TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003 (pp. 1651-1654). Los Alamitos: IEEE Computer Society.