Fabrication of an active nanostencil with integrated microshutters

R.W. Tjerkstra; P. Ekkels; Gijsbertus J.M. Krijnen; S. Egger; Johan W. Berenschot; Kechun Ma; J.P. Brugger

Fabrication of an active nanostencil with integrated microshutters

R.W. Tjerkstra, P. Ekkels, Gijsbertus J.M. Krijnen, S. Egger, Johan W. Berenschot, Kechun Ma, J.P. Brugger

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

4 Citations (Scopus)

52 Downloads (Pure)

Abstract

An active nanostencil, consisting of a thin (200 nm) silicon nitride membrane with attached polysilicon microactuators that can be used to dynamically open and/or close holes in the silicon nitride membrane, is presented. This nanostencil can be used as a shadow mask in an evaporation setup. Main features of the nanostencil are the absence of sacrificial oxide in the final product, strengthening of the membrane by a polysilicon hexagonal structure that is attached directly to the membrane and the use of low-doped regions in the polysilicon to separate the stator and rotor electrically.

Original language	Undefined
Title of host publication	TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003
Place of Publication	Los Alamitos
Publisher	IEEE Computer Society
Pages	1651-1654
Number of pages	4
ISBN (Print)	0-7803-7731-1
Publication status	Published - Jun 2003
Event	12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Boston, United States Duration: 8 Jun 2003 → 12 Jun 2003 Conference number: 12

Publication series

Name
Publisher	IEEE
Volume	2

Conference

Conference	12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003
Abbreviated title	TRANSDUCERS 2003
Country	United States
City	Boston
Period	8/06/03 → 12/06/03

Keywords

METIS-215248
EWI-11159
IR-46524

Access to Document

01217099
open
Final published version, 329 KB

http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=1217099

Cite this

Tjerkstra, R. W., Ekkels, P., Krijnen, G. J. M., Egger, S., Berenschot, J. W., Ma, K., & Brugger, J. P. (2003). Fabrication of an active nanostencil with integrated microshutters. In TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003 (pp. 1651-1654). Los Alamitos: IEEE Computer Society.

@inproceedings{3a81813889a546edb1de0908e22528eb,

title = "Fabrication of an active nanostencil with integrated microshutters",

abstract = "An active nanostencil, consisting of a thin (200 nm) silicon nitride membrane with attached polysilicon microactuators that can be used to dynamically open and/or close holes in the silicon nitride membrane, is presented. This nanostencil can be used as a shadow mask in an evaporation setup. Main features of the nanostencil are the absence of sacrificial oxide in the final product, strengthening of the membrane by a polysilicon hexagonal structure that is attached directly to the membrane and the use of low-doped regions in the polysilicon to separate the stator and rotor electrically.",

keywords = "METIS-215248, EWI-11159, IR-46524",

author = "R.W. Tjerkstra and P. Ekkels and Krijnen, {Gijsbertus J.M.} and S. Egger and Berenschot, {Johan W.} and Kechun Ma and J.P. Brugger",

year = "2003",

month = "6",

language = "Undefined",

isbn = "0-7803-7731-1",

publisher = "IEEE Computer Society",

pages = "1651--1654",

booktitle = "TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003",

address = "United States",

}

Tjerkstra, RW, Ekkels, P, Krijnen, GJM, Egger, S, Berenschot, JW, Ma, K & Brugger, JP 2003, Fabrication of an active nanostencil with integrated microshutters. in TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003. IEEE Computer Society, Los Alamitos, pp. 1651-1654, 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003, Boston, United States, 8/06/03.

Fabrication of an active nanostencil with integrated microshutters. / Tjerkstra, R.W.; Ekkels, P.; Krijnen, Gijsbertus J.M.; Egger, S.; Berenschot, Johan W.; Ma, Kechun; Brugger, J.P.

TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003. Los Alamitos : IEEE Computer Society, 2003. p. 1651-1654.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Fabrication of an active nanostencil with integrated microshutters

AU - Tjerkstra, R.W.

AU - Ekkels, P.

AU - Krijnen, Gijsbertus J.M.

AU - Egger, S.

AU - Berenschot, Johan W.

AU - Ma, Kechun

AU - Brugger, J.P.

PY - 2003/6

Y1 - 2003/6

N2 - An active nanostencil, consisting of a thin (200 nm) silicon nitride membrane with attached polysilicon microactuators that can be used to dynamically open and/or close holes in the silicon nitride membrane, is presented. This nanostencil can be used as a shadow mask in an evaporation setup. Main features of the nanostencil are the absence of sacrificial oxide in the final product, strengthening of the membrane by a polysilicon hexagonal structure that is attached directly to the membrane and the use of low-doped regions in the polysilicon to separate the stator and rotor electrically.

AB - An active nanostencil, consisting of a thin (200 nm) silicon nitride membrane with attached polysilicon microactuators that can be used to dynamically open and/or close holes in the silicon nitride membrane, is presented. This nanostencil can be used as a shadow mask in an evaporation setup. Main features of the nanostencil are the absence of sacrificial oxide in the final product, strengthening of the membrane by a polysilicon hexagonal structure that is attached directly to the membrane and the use of low-doped regions in the polysilicon to separate the stator and rotor electrically.

KW - METIS-215248

KW - EWI-11159

KW - IR-46524

M3 - Conference contribution

SN - 0-7803-7731-1

SP - 1651

EP - 1654

BT - TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003

PB - IEEE Computer Society

CY - Los Alamitos

ER -