Abstract
An active nanostencil, consisting of a thin (200 nm) silicon nitride membrane with attached polysilicon microactuators that can be used to dynamically open and/or close holes in the silicon nitride membrane, is presented. This nanostencil can be used as a shadow mask in an evaporation setup. Main features of the nanostencil are the absence of sacrificial oxide in the final product, strengthening of the membrane by a polysilicon hexagonal structure that is attached directly to the membrane and the use of low-doped regions in the polysilicon to separate the stator and rotor electrically.
Original language | Undefined |
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Title of host publication | TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003 |
Place of Publication | Los Alamitos |
Publisher | IEEE |
Pages | 1651-1654 |
Number of pages | 4 |
ISBN (Print) | 0-7803-7731-1 |
Publication status | Published - Jun 2003 |
Event | 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Boston, United States Duration: 8 Jun 2003 → 12 Jun 2003 Conference number: 12 |
Publication series
Name | |
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Publisher | IEEE |
Volume | 2 |
Conference
Conference | 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 |
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Abbreviated title | TRANSDUCERS 2003 |
Country/Territory | United States |
City | Boston |
Period | 8/06/03 → 12/06/03 |
Keywords
- METIS-215248
- EWI-11159
- IR-46524