Fabrication of an active nanostencil with integrated microshutters

R.W. Tjerkstra, P. Ekkels, Gijsbertus J.M. Krijnen, S. Egger, Johan W. Berenschot, Kechun Ma, J.P. Brugger

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    4 Citations (Scopus)
    39 Downloads (Pure)

    Abstract

    An active nanostencil, consisting of a thin (200 nm) silicon nitride membrane with attached polysilicon microactuators that can be used to dynamically open and/or close holes in the silicon nitride membrane, is presented. This nanostencil can be used as a shadow mask in an evaporation setup. Main features of the nanostencil are the absence of sacrificial oxide in the final product, strengthening of the membrane by a polysilicon hexagonal structure that is attached directly to the membrane and the use of low-doped regions in the polysilicon to separate the stator and rotor electrically.
    Original languageUndefined
    Title of host publicationTRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003
    Place of PublicationLos Alamitos
    PublisherIEEE Computer Society
    Pages1651-1654
    Number of pages4
    ISBN (Print)0-7803-7731-1
    Publication statusPublished - Jun 2003
    Event12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Boston, United States
    Duration: 8 Jun 200312 Jun 2003
    Conference number: 12

    Publication series

    Name
    PublisherIEEE
    Volume2

    Conference

    Conference12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003
    Abbreviated titleTRANSDUCERS 2003
    CountryUnited States
    CityBoston
    Period8/06/0312/06/03

    Keywords

    • METIS-215248
    • EWI-11159
    • IR-46524

    Cite this

    Tjerkstra, R. W., Ekkels, P., Krijnen, G. J. M., Egger, S., Berenschot, J. W., Ma, K., & Brugger, J. P. (2003). Fabrication of an active nanostencil with integrated microshutters. In TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003 (pp. 1651-1654). Los Alamitos: IEEE Computer Society.
    Tjerkstra, R.W. ; Ekkels, P. ; Krijnen, Gijsbertus J.M. ; Egger, S. ; Berenschot, Johan W. ; Ma, Kechun ; Brugger, J.P. / Fabrication of an active nanostencil with integrated microshutters. TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003. Los Alamitos : IEEE Computer Society, 2003. pp. 1651-1654
    @inproceedings{3a81813889a546edb1de0908e22528eb,
    title = "Fabrication of an active nanostencil with integrated microshutters",
    abstract = "An active nanostencil, consisting of a thin (200 nm) silicon nitride membrane with attached polysilicon microactuators that can be used to dynamically open and/or close holes in the silicon nitride membrane, is presented. This nanostencil can be used as a shadow mask in an evaporation setup. Main features of the nanostencil are the absence of sacrificial oxide in the final product, strengthening of the membrane by a polysilicon hexagonal structure that is attached directly to the membrane and the use of low-doped regions in the polysilicon to separate the stator and rotor electrically.",
    keywords = "METIS-215248, EWI-11159, IR-46524",
    author = "R.W. Tjerkstra and P. Ekkels and Krijnen, {Gijsbertus J.M.} and S. Egger and Berenschot, {Johan W.} and Kechun Ma and J.P. Brugger",
    year = "2003",
    month = "6",
    language = "Undefined",
    isbn = "0-7803-7731-1",
    publisher = "IEEE Computer Society",
    pages = "1651--1654",
    booktitle = "TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003",
    address = "United States",

    }

    Tjerkstra, RW, Ekkels, P, Krijnen, GJM, Egger, S, Berenschot, JW, Ma, K & Brugger, JP 2003, Fabrication of an active nanostencil with integrated microshutters. in TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003. IEEE Computer Society, Los Alamitos, pp. 1651-1654, 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003, Boston, United States, 8/06/03.

    Fabrication of an active nanostencil with integrated microshutters. / Tjerkstra, R.W.; Ekkels, P.; Krijnen, Gijsbertus J.M.; Egger, S.; Berenschot, Johan W.; Ma, Kechun; Brugger, J.P.

    TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003. Los Alamitos : IEEE Computer Society, 2003. p. 1651-1654.

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    TY - GEN

    T1 - Fabrication of an active nanostencil with integrated microshutters

    AU - Tjerkstra, R.W.

    AU - Ekkels, P.

    AU - Krijnen, Gijsbertus J.M.

    AU - Egger, S.

    AU - Berenschot, Johan W.

    AU - Ma, Kechun

    AU - Brugger, J.P.

    PY - 2003/6

    Y1 - 2003/6

    N2 - An active nanostencil, consisting of a thin (200 nm) silicon nitride membrane with attached polysilicon microactuators that can be used to dynamically open and/or close holes in the silicon nitride membrane, is presented. This nanostencil can be used as a shadow mask in an evaporation setup. Main features of the nanostencil are the absence of sacrificial oxide in the final product, strengthening of the membrane by a polysilicon hexagonal structure that is attached directly to the membrane and the use of low-doped regions in the polysilicon to separate the stator and rotor electrically.

    AB - An active nanostencil, consisting of a thin (200 nm) silicon nitride membrane with attached polysilicon microactuators that can be used to dynamically open and/or close holes in the silicon nitride membrane, is presented. This nanostencil can be used as a shadow mask in an evaporation setup. Main features of the nanostencil are the absence of sacrificial oxide in the final product, strengthening of the membrane by a polysilicon hexagonal structure that is attached directly to the membrane and the use of low-doped regions in the polysilicon to separate the stator and rotor electrically.

    KW - METIS-215248

    KW - EWI-11159

    KW - IR-46524

    M3 - Conference contribution

    SN - 0-7803-7731-1

    SP - 1651

    EP - 1654

    BT - TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003

    PB - IEEE Computer Society

    CY - Los Alamitos

    ER -

    Tjerkstra RW, Ekkels P, Krijnen GJM, Egger S, Berenschot JW, Ma K et al. Fabrication of an active nanostencil with integrated microshutters. In TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003. Los Alamitos: IEEE Computer Society. 2003. p. 1651-1654