Abstract
| Original language | Undefined |
|---|---|
| Title of host publication | TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003 |
| Place of Publication | Los Alamitos |
| Publisher | IEEE Computer Society |
| Pages | 1651-1654 |
| Number of pages | 4 |
| ISBN (Print) | 0-7803-7731-1 |
| Publication status | Published - Jun 2003 |
| Event | 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Boston, United States Duration: 8 Jun 2003 → 12 Jun 2003 Conference number: 12 |
Publication series
| Name | |
|---|---|
| Publisher | IEEE |
| Volume | 2 |
Conference
| Conference | 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 |
|---|---|
| Abbreviated title | TRANSDUCERS 2003 |
| Country | United States |
| City | Boston |
| Period | 8/06/03 → 12/06/03 |
Keywords
- METIS-215248
- EWI-11159
- IR-46524
Cite this
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Fabrication of an active nanostencil with integrated microshutters. / Tjerkstra, R.W.; Ekkels, P.; Krijnen, Gijsbertus J.M.; Egger, S.; Berenschot, Johan W.; Ma, Kechun; Brugger, J.P.
TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003. Los Alamitos : IEEE Computer Society, 2003. p. 1651-1654.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
TY - GEN
T1 - Fabrication of an active nanostencil with integrated microshutters
AU - Tjerkstra, R.W.
AU - Ekkels, P.
AU - Krijnen, Gijsbertus J.M.
AU - Egger, S.
AU - Berenschot, Johan W.
AU - Ma, Kechun
AU - Brugger, J.P.
PY - 2003/6
Y1 - 2003/6
N2 - An active nanostencil, consisting of a thin (200 nm) silicon nitride membrane with attached polysilicon microactuators that can be used to dynamically open and/or close holes in the silicon nitride membrane, is presented. This nanostencil can be used as a shadow mask in an evaporation setup. Main features of the nanostencil are the absence of sacrificial oxide in the final product, strengthening of the membrane by a polysilicon hexagonal structure that is attached directly to the membrane and the use of low-doped regions in the polysilicon to separate the stator and rotor electrically.
AB - An active nanostencil, consisting of a thin (200 nm) silicon nitride membrane with attached polysilicon microactuators that can be used to dynamically open and/or close holes in the silicon nitride membrane, is presented. This nanostencil can be used as a shadow mask in an evaporation setup. Main features of the nanostencil are the absence of sacrificial oxide in the final product, strengthening of the membrane by a polysilicon hexagonal structure that is attached directly to the membrane and the use of low-doped regions in the polysilicon to separate the stator and rotor electrically.
KW - METIS-215248
KW - EWI-11159
KW - IR-46524
M3 - Conference contribution
SN - 0-7803-7731-1
SP - 1651
EP - 1654
BT - TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003
PB - IEEE Computer Society
CY - Los Alamitos
ER -