Fabrication of an active nanostencil with integrated microshutters

R.W. Tjerkstra, P. Ekkels, Gijsbertus J.M. Krijnen, S. Egger, Johan W. Berenschot, Kechun Ma, J.P. Brugger

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

    4 Citations (Scopus)
    179 Downloads (Pure)

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