Fabrication of an electro-optic polymer microring resonator

M. Balakrishnan; E.J. Klein; Mart Diemeer; A. Driessen; M. Faccini; Willem Verboom; David Reinhoudt; Arne Leinse

Fabrication of an electro-optic polymer microring resonator

M. Balakrishnan, E.J. Klein, Mart Diemeer, A. Driessen, M. Faccini, Willem Verboom, David Reinhoudt, Arne Leinse

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Abstract

A laterally coupled electro-optic polymer microring resonator was designed and fabricated. The design consists of microrings of 200 μm radius with racetrack structures to improve the coupling between the bus waveguide and the ring. Two different fabrication schemes namely reactive ion etching (RIE) and photodefinition are presented. Thermally grown siliconoxide on conducting silicon was used as the bottom cladding. Passive ring resonance behavior has been demonstrated around 1550 nm. The through port response of the ring showed a maximum extinction of about 12 dB and a finesse of 6.

Original language	Undefined
Title of host publication	11th Annual Symposium IEEE/LEOS Benelux
Editors	A.M.J. Koonen, X.J.M. Leijtens, H.P.A. van den Boom, E.J.M. Verdurmen, J. Molina Vazquez
Place of Publication	Eindhoven
Publisher	IEEE
Pages	73-76
Number of pages	4
ISBN (Print)	978-90-6144-989-8
Publication status	Published - 30 Nov 2006
Event	11th Annual Symposium IEEE/LEOS Benelux Chapter 2006 - Eindhoven, The Netherlands, Eindhoven, Netherlands Duration: 30 Nov 2006 → 1 Dec 2006 Conference number: 11

Publication series

Name
Publisher	IEEE/LEOS Benelux Chapter
Number	Technical

Conference

Conference	11th Annual Symposium IEEE/LEOS Benelux Chapter 2006
Country/Territory	Netherlands
City	Eindhoven
Period	30/11/06 → 1/12/06

Keywords

IOMS-PIT: PHOTONICS INTEGRATION TECHNOLOGY
IR-66827
METIS-237870
EWI-8923

Access to Document

http://leosbenelux.org/symp06/s06p073.pdf

Cite this

Balakrishnan, M., Klein, E. J., Diemeer, M., Driessen, A., Faccini, M., Verboom, W., Reinhoudt, D., & Leinse, A. (2006). Fabrication of an electro-optic polymer microring resonator. In A. M. J. Koonen, X. J. M. Leijtens, H. P. A. van den Boom, E. J. M. Verdurmen, & J. Molina Vazquez (Eds.), 11th Annual Symposium IEEE/LEOS Benelux (pp. 73-76). IEEE. http://leosbenelux.org/symp06/s06p073.pdf

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title = "Fabrication of an electro-optic polymer microring resonator",

abstract = "A laterally coupled electro-optic polymer microring resonator was designed and fabricated. The design consists of microrings of 200 μm radius with racetrack structures to improve the coupling between the bus waveguide and the ring. Two different fabrication schemes namely reactive ion etching (RIE) and photodefinition are presented. Thermally grown siliconoxide on conducting silicon was used as the bottom cladding. Passive ring resonance behavior has been demonstrated around 1550 nm. The through port response of the ring showed a maximum extinction of about 12 dB and a finesse of 6.",

keywords = "IOMS-PIT: PHOTONICS INTEGRATION TECHNOLOGY, IR-66827, METIS-237870, EWI-8923",

author = "M. Balakrishnan and E.J. Klein and Mart Diemeer and A. Driessen and M. Faccini and Willem Verboom and David Reinhoudt and Arne Leinse",

note = "eemcs-eprint-8923 ; 11th Annual Symposium IEEE/LEOS Benelux Chapter 2006 ; Conference date: 30-11-2006 Through 01-12-2006",

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language = "Undefined",

isbn = "978-90-6144-989-8",

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pages = "73--76",

editor = "A.M.J. Koonen and X.J.M. Leijtens and {van den Boom}, H.P.A. and E.J.M. Verdurmen and {Molina Vazquez}, J.",

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Balakrishnan, M, Klein, EJ, Diemeer, M, Driessen, A, Faccini, M, Verboom, W , Reinhoudt, D & Leinse, A 2006, Fabrication of an electro-optic polymer microring resonator. in AMJ Koonen, XJM Leijtens, HPA van den Boom, EJM Verdurmen & J Molina Vazquez (eds), 11th Annual Symposium IEEE/LEOS Benelux. IEEE, Eindhoven, pp. 73-76, 11th Annual Symposium IEEE/LEOS Benelux Chapter 2006, Eindhoven, Netherlands, 30/11/06. <http://leosbenelux.org/symp06/s06p073.pdf>

Fabrication of an electro-optic polymer microring resonator. / Balakrishnan, M.; Klein, E.J.; Diemeer, Mart et al.
11th Annual Symposium IEEE/LEOS Benelux. ed. / A.M.J. Koonen; X.J.M. Leijtens; H.P.A. van den Boom; E.J.M. Verdurmen; J. Molina Vazquez. Eindhoven: IEEE, 2006. p. 73-76.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Fabrication of an electro-optic polymer microring resonator

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AU - Klein, E.J.

AU - Diemeer, Mart

AU - Driessen, A.

AU - Faccini, M.

AU - Verboom, Willem

AU - Reinhoudt, David

AU - Leinse, Arne

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N2 - A laterally coupled electro-optic polymer microring resonator was designed and fabricated. The design consists of microrings of 200 μm radius with racetrack structures to improve the coupling between the bus waveguide and the ring. Two different fabrication schemes namely reactive ion etching (RIE) and photodefinition are presented. Thermally grown siliconoxide on conducting silicon was used as the bottom cladding. Passive ring resonance behavior has been demonstrated around 1550 nm. The through port response of the ring showed a maximum extinction of about 12 dB and a finesse of 6.

AB - A laterally coupled electro-optic polymer microring resonator was designed and fabricated. The design consists of microrings of 200 μm radius with racetrack structures to improve the coupling between the bus waveguide and the ring. Two different fabrication schemes namely reactive ion etching (RIE) and photodefinition are presented. Thermally grown siliconoxide on conducting silicon was used as the bottom cladding. Passive ring resonance behavior has been demonstrated around 1550 nm. The through port response of the ring showed a maximum extinction of about 12 dB and a finesse of 6.

KW - IOMS-PIT: PHOTONICS INTEGRATION TECHNOLOGY

KW - IR-66827

KW - METIS-237870

KW - EWI-8923

M3 - Conference contribution

SN - 978-90-6144-989-8

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EP - 76

BT - 11th Annual Symposium IEEE/LEOS Benelux

A2 - Koonen, A.M.J.

A2 - Leijtens, X.J.M.

A2 - van den Boom, H.P.A.

A2 - Verdurmen, E.J.M.

A2 - Molina Vazquez, J.

PB - IEEE

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T2 - 11th Annual Symposium IEEE/LEOS Benelux Chapter 2006

Y2 - 30 November 2006 through 1 December 2006

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