Fabrication of an electro-optic polymer microring resonator

M. Balakrishnan, E.J. Klein, Mart Diemeer, A. Driessen, M. Faccini, Willem Verboom, David Reinhoudt, Arne Leinse

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Abstract

A laterally coupled electro-optic polymer microring resonator was designed and fabricated. The design consists of microrings of 200 μm radius with racetrack structures to improve the coupling between the bus waveguide and the ring. Two different fabrication schemes namely reactive ion etching (RIE) and photodefinition are presented. Thermally grown siliconoxide on conducting silicon was used as the bottom cladding. Passive ring resonance behavior has been demonstrated around 1550 nm. The through port response of the ring showed a maximum extinction of about 12 dB and a finesse of 6.
Original languageUndefined
Title of host publication11th Annual Symposium IEEE/LEOS Benelux
EditorsA.M.J. Koonen, X.J.M. Leijtens, H.P.A. van den Boom, E.J.M. Verdurmen, J. Molina Vazquez
Place of PublicationEindhoven
PublisherIEEE/LEOS Benelux Chapter
Pages73-76
Number of pages4
ISBN (Print)978-90-6144-989-8
Publication statusPublished - 30 Nov 2006
Event11th Annual Symposium IEEE/LEOS Benelux Chapter 2006 - Eindhoven, The Netherlands, Eindhoven, Netherlands
Duration: 30 Nov 20061 Dec 2006
Conference number: 11

Publication series

Name
PublisherIEEE/LEOS Benelux Chapter
NumberTechnical

Conference

Conference11th Annual Symposium IEEE/LEOS Benelux Chapter 2006
CountryNetherlands
CityEindhoven
Period30/11/061/12/06

Keywords

  • IOMS-PIT: PHOTONICS INTEGRATION TECHNOLOGY
  • IR-66827
  • METIS-237870
  • EWI-8923

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