Fabrication of arrays of artificial hairs for complex flow pattern recognition

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    Abstract

    We present monolithically integrated high-density arrays of artificial hairs for flow pattern measurements based on drag force. A combined bulk/surface micromachining process has been developed to integrate the artificial hairs with capacitive read-out. First fabrication results show the possibility to fabricate out-of-plane hairs without reverting to micro-assembly technologies. This enables realisation of high-density arrays of symmetrical sensors with two-dimensional sensitivity
    Original languageEnglish
    Title of host publicationProceedings of IEEE Sensors, 2003
    Place of PublicationLos Alamitos
    PublisherIEEE Computer Society
    Pages332-336
    Number of pages5
    ISBN (Print)0-7803-8133-5
    DOIs
    Publication statusPublished - Oct 2003
    Event2003 IEEE Sensors: The 2nd Conference on Sensors - Toronto, Canada
    Duration: 22 Oct 200324 Oct 2003
    http://ewh.ieee.org/conf/sensors2003/

    Conference

    Conference2003 IEEE Sensors
    CountryCanada
    CityToronto
    Period22/10/0324/10/03
    Internet address

    Keywords

    • TST-Life like
    • METIS-215246
    • EWI-11157
    • IR-46523

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