Fabrication of arrays of artificial hairs for complex flow pattern recognition

J.J.J. van Baar; Marcel Dijkstra; Mindert Dijkstra; Remco J. Wiegerink; Theodorus S.J. Lammerink; Gijsbertus J.M. Krijnen

doi:10.1109/ICSENS.2003.1278952

Fabrication of arrays of artificial hairs for complex flow pattern recognition

J.J.J. van Baar, Marcel Dijkstra, Mindert Dijkstra, Remco J. Wiegerink, Theodorus S.J. Lammerink, Gijsbertus J.M. Krijnen

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Abstract

We present monolithically integrated high-density arrays of artificial hairs for flow pattern measurements based on drag force. A combined bulk/surface micromachining process has been developed to integrate the artificial hairs with capacitive read-out. First fabrication results show the possibility to fabricate out-of-plane hairs without reverting to micro-assembly technologies. This enables realisation of high-density arrays of symmetrical sensors with two-dimensional sensitivity

Original language	English
Title of host publication	Proceedings of IEEE Sensors, 2003
Place of Publication	Los Alamitos
Publisher	IEEE
Pages	332-336
Number of pages	5
ISBN (Print)	0-7803-8133-5
DOIs	https://doi.org/10.1109/ICSENS.2003.1278952
Publication status	Published - Oct 2003
Event	2003 IEEE Sensors: The 2nd Conference on Sensors - Toronto, Canada Duration: 22 Oct 2003 → 24 Oct 2003 http://ewh.ieee.org/conf/sensors2003/

Conference

Conference	2003 IEEE Sensors
Country/Territory	Canada
City	Toronto
Period	22/10/03 → 24/10/03
Internet address	http://ewh.ieee.org/conf/sensors2003/

Keywords

TST-Life like
METIS-215246
EWI-11157
IR-46523

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

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10.1109/ICSENS.2003.1278952

Cite this

@inproceedings{e1c7efe58f2642c7bd8ae8af84232642,

title = "Fabrication of arrays of artificial hairs for complex flow pattern recognition",

abstract = "We present monolithically integrated high-density arrays of artificial hairs for flow pattern measurements based on drag force. A combined bulk/surface micromachining process has been developed to integrate the artificial hairs with capacitive read-out. First fabrication results show the possibility to fabricate out-of-plane hairs without reverting to micro-assembly technologies. This enables realisation of high-density arrays of symmetrical sensors with two-dimensional sensitivity",

keywords = "TST-Life like, METIS-215246, EWI-11157, IR-46523",

author = "\{van Baar\}, J.J.J. and Marcel Dijkstra and Mindert Dijkstra and Wiegerink, \{Remco J.\} and Lammerink, \{Theodorus S.J.\} and Krijnen, \{Gijsbertus J.M.\}",

year = "2003",

month = oct,

doi = "10.1109/ICSENS.2003.1278952",

language = "English",

isbn = "0-7803-8133-5",

pages = "332--336",

booktitle = "Proceedings of IEEE Sensors, 2003",

publisher = "IEEE",

address = "United States",

note = "2003 IEEE Sensors : The 2nd Conference on Sensors ; Conference date: 22-10-2003 Through 24-10-2003",

url = "http://ewh.ieee.org/conf/sensors2003/",

}

TY - GEN

T1 - Fabrication of arrays of artificial hairs for complex flow pattern recognition

AU - van Baar, J.J.J.

AU - Dijkstra, Marcel

AU - Dijkstra, Mindert

AU - Wiegerink, Remco J.

AU - Lammerink, Theodorus S.J.

AU - Krijnen, Gijsbertus J.M.

PY - 2003/10

Y1 - 2003/10

N2 - We present monolithically integrated high-density arrays of artificial hairs for flow pattern measurements based on drag force. A combined bulk/surface micromachining process has been developed to integrate the artificial hairs with capacitive read-out. First fabrication results show the possibility to fabricate out-of-plane hairs without reverting to micro-assembly technologies. This enables realisation of high-density arrays of symmetrical sensors with two-dimensional sensitivity

AB - We present monolithically integrated high-density arrays of artificial hairs for flow pattern measurements based on drag force. A combined bulk/surface micromachining process has been developed to integrate the artificial hairs with capacitive read-out. First fabrication results show the possibility to fabricate out-of-plane hairs without reverting to micro-assembly technologies. This enables realisation of high-density arrays of symmetrical sensors with two-dimensional sensitivity

KW - TST-Life like

KW - METIS-215246

KW - EWI-11157

KW - IR-46523

U2 - 10.1109/ICSENS.2003.1278952

DO - 10.1109/ICSENS.2003.1278952

M3 - Conference contribution

SN - 0-7803-8133-5

SP - 332

EP - 336

BT - Proceedings of IEEE Sensors, 2003

PB - IEEE

CY - Los Alamitos

T2 - 2003 IEEE Sensors

Y2 - 22 October 2003 through 24 October 2003

ER -

Fabrication of arrays of artificial hairs for complex flow pattern recognition

Abstract

Conference

Keywords

UN SDGs

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