Fabrication of artificial hairs with capactive read out for flow sensing

J.J.J. van Baar, J.H. de Boer, Marcel Dijkstra, Remco J. Wiegerink, Theodorus S.J. Lammerink, Gijsbertus J.M. Krijnen

    Research output: Contribution to conferencePosterOther research output

    Original languageUndefined
    Pages-
    Publication statusPublished - 5 Sept 2004
    Event15th MicroMechanics Europe Workshop, MME 2004 - Leuven, Belgium
    Duration: 5 Sept 20047 Sept 2004
    Conference number: 15

    Workshop

    Workshop15th MicroMechanics Europe Workshop, MME 2004
    Abbreviated titleMME
    Country/TerritoryBelgium
    CityLeuven
    Period5/09/047/09/04

    Keywords

    • METIS-219754

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