Abstract
We report on progress in the fabrication
of cantilever arrays with tips. The process
features only one lithographic step for the definition
of both the tips and cantilevers. The tips have a
uniform height distribution and are placed by selfalignment
on the cantilever. The arrays are fabricated
for an optical readout technique under development
in which the cantilever arrays serve as
diffraction gratings. This work describes our ongoing
effort in array fabrication as well as preliminary
results on optical readout of a previously fabricated
batch of tipless cantilever arrays using Fraunhofer
diffraction.
| Original language | English |
|---|---|
| Title of host publication | Proceedings of the 21st Micromechanics and Micro systems Europe workshop (MME 2010) |
| Place of Publication | Enschede, The Netherlands |
| Publisher | University of Twente - Transducers Science and Technology (TST) |
| Pages | 277-280 |
| Number of pages | 4 |
| ISBN (Print) | 978-90-81673716 |
| Publication status | Published - Sept 2010 |
| Event | 21st Micromechanics and Microsystems Europe Workshop, MME 2010 - University of Twente, Enschede, Netherlands Duration: 26 Sept 2010 → 29 Sept 2010 Conference number: 21 |
Workshop
| Workshop | 21st Micromechanics and Microsystems Europe Workshop, MME 2010 |
|---|---|
| Abbreviated title | MME |
| Country/Territory | Netherlands |
| City | Enschede |
| Period | 26/09/10 → 29/09/10 |
Keywords
- Cantilever array
- TST-SMI: Formerly in EWI-SMI
- Tip fabrication
- Optical readout
- TST-uSPAM: micro Scanning Probe Array Memory
- EC Grant Agreement nr.: FP6/034719