Fabrication of cantilever arrays with tips for parallel optical readout

W.W. Koelmans, T. Peters, Leon Abelmann, Michael Curt Elwenspoek

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    Abstract

    We report on progress in the fabrication of cantilever arrays with tips. The process features only one lithographic step for the definition of both the tips and cantilevers. The tips have a uniform height distribution and are placed by selfalignment on the cantilever. The arrays are fabricated for an optical readout technique under development in which the cantilever arrays serve as diffraction gratings. This work describes our ongoing effort in array fabrication as well as preliminary results on optical readout of a previously fabricated batch of tipless cantilever arrays using Fraunhofer diffraction.
    Original languageEnglish
    Title of host publicationProceedings of the 21st Micromechanics and Micro systems Europe workshop (MME 2010)
    Place of PublicationEnschede, The Netherlands
    PublisherUniversity of Twente - Transducers Science and Technology (TST)
    Pages277-280
    Number of pages4
    ISBN (Print)978-90-81673716
    Publication statusPublished - Sep 2010
    Event21st Micromechanics and Microsystems Europe Workshop, MME 2010 - University of Twente, Enschede, Netherlands
    Duration: 26 Sep 201029 Sep 2010
    Conference number: 21

    Workshop

    Workshop21st Micromechanics and Microsystems Europe Workshop, MME 2010
    Abbreviated titleMME
    CountryNetherlands
    CityEnschede
    Period26/09/1029/09/10

    Keywords

    • Cantilever array
    • TST-SMI: Formerly in EWI-SMI
    • Tip fabrication
    • Optical readout
    • TST-uSPAM: micro Scanning Probe Array Memory
    • EC Grant Agreement nr.: FP6/034719

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  • Cite this

    Koelmans, W. W., Peters, T., Abelmann, L., & Elwenspoek, M. C. (2010). Fabrication of cantilever arrays with tips for parallel optical readout. In Proceedings of the 21st Micromechanics and Micro systems Europe workshop (MME 2010) (pp. 277-280). Enschede, The Netherlands: University of Twente - Transducers Science and Technology (TST).