Fabrication of dense flow sensor arrays on flexible membranes

N. Izadi, Meint J. de Boer, Johan W. Berenschot, Remco J. Wiegerink, Theodorus S.J. Lammerink, Henricus V. Jansen, J. Mogdans, Gijsbertus J.M. Krijnen

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    11 Citations (Scopus)
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    Biological sensory systems often display great performance which inspires engineers to design artificial counterparts. In this paper we report the fabrication of aquatic hair based flow sensors inspired by fish lateral line. Geometrically optimized flexible membranes of SU-8 with integrated electrodes underneath have been realized in a reliable, high yield process. By separating the liquid medium from readout electrodes we decrease squeeze film damping and eliminate electrolysis. The procedure allows dense membrane array fabrication.
    Original languageUndefined
    Title of host publicationProceedings of the 15th International Conference on Solid State Sensors, Actuators and Microsystems
    Place of PublicationUSA
    Number of pages4
    ISBN (Print)978-1-4244-4193-8
    Publication statusPublished - 21 Jun 2009
    Event15th International Conference on Solid-State Sensors, Actuators and Microsystems - Sheraton Denver Hotel, Denver, United States
    Duration: 21 Jun 200925 Jun 2009
    Conference number: 15

    Publication series



    Conference15th International Conference on Solid-State Sensors, Actuators and Microsystems
    Abbreviated titleTRANSDUCERS 2009
    Country/TerritoryUnited States


    • IR-67518
    • METIS-263917
    • DRIE
    • Flow sensors
    • TST-Life like
    • EWI-15689
    • Lateral line
    • SU-8
    • Biomimetic

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