Fabrication of dense flow sensor arrays on flexible membranes

N. Izadi; Meint J. de Boer; Johan W. Berenschot; Remco J. Wiegerink; Theodorus S.J. Lammerink; Henricus V. Jansen; J. Mogdans; Gijsbertus J.M. Krijnen

doi:10.1109/SENSOR.2009.5285945

Fabrication of dense flow sensor arrays on flexible membranes

N. Izadi, Meint J. de Boer, Johan W. Berenschot, Remco J. Wiegerink, Theodorus S.J. Lammerink, Henricus V. Jansen, J. Mogdans, Gijsbertus J.M. Krijnen

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

11 Citations (Scopus)

303 Downloads (Pure)

Abstract

Biological sensory systems often display great performance which inspires engineers to design artificial counterparts. In this paper we report the fabrication of aquatic hair based flow sensors inspired by fish lateral line. Geometrically optimized flexible membranes of SU-8 with integrated electrodes underneath have been realized in a reliable, high yield process. By separating the liquid medium from readout electrodes we decrease squeeze film damping and eliminate electrolysis. The procedure allows dense membrane array fabrication.

Original language	Undefined
Title of host publication	Proceedings of the 15th International Conference on Solid State Sensors, Actuators and Microsystems
Place of Publication	USA
Publisher	IEEE
Pages	1075-1078
Number of pages	4
ISBN (Print)	978-1-4244-4193-8
DOIs	https://doi.org/10.1109/SENSOR.2009.5285945
Publication status	Published - 21 Jun 2009
Event	15th International Conference on Solid-State Sensors, Actuators and Microsystems - Sheraton Denver Hotel, Denver, United States Duration: 21 Jun 2009 → 25 Jun 2009 Conference number: 15

Publication series

Name
Publisher	IEEE

Conference

Conference	15th International Conference on Solid-State Sensors, Actuators and Microsystems
Abbreviated title	TRANSDUCERS 2009
Country/Territory	United States
City	Denver
Period	21/06/09 → 25/06/09

Keywords

IR-67518
METIS-263917
DRIE
Flow sensors
TST-Life like
EWI-15689
Lateral line
SU-8
Biomimetic

Access to Document

10.1109/SENSOR.2009.5285945

Cite this

Izadi, N., de Boer, M. J., Berenschot, J. W., Wiegerink, R. J., Lammerink, T. S. J., Jansen, H. V., Mogdans, J., & Krijnen, G. J. M. (2009). Fabrication of dense flow sensor arrays on flexible membranes. In Proceedings of the 15th International Conference on Solid State Sensors, Actuators and Microsystems (pp. 1075-1078). IEEE. https://doi.org/10.1109/SENSOR.2009.5285945

@inproceedings{0dcd69b9a9944560a28d2a163ee8ebaa,

title = "Fabrication of dense flow sensor arrays on flexible membranes",

abstract = "Biological sensory systems often display great performance which inspires engineers to design artificial counterparts. In this paper we report the fabrication of aquatic hair based flow sensors inspired by fish lateral line. Geometrically optimized flexible membranes of SU-8 with integrated electrodes underneath have been realized in a reliable, high yield process. By separating the liquid medium from readout electrodes we decrease squeeze film damping and eliminate electrolysis. The procedure allows dense membrane array fabrication.",

keywords = "IR-67518, METIS-263917, DRIE, Flow sensors, TST-Life like, EWI-15689, Lateral line, SU-8, Biomimetic",

author = "N. Izadi and {de Boer}, {Meint J.} and Berenschot, {Johan W.} and Wiegerink, {Remco J.} and Lammerink, {Theodorus S.J.} and Jansen, {Henricus V.} and J. Mogdans and Krijnen, {Gijsbertus J.M.}",

year = "2009",

month = jun,

day = "21",

doi = "10.1109/SENSOR.2009.5285945",

language = "Undefined",

isbn = "978-1-4244-4193-8",

publisher = "IEEE",

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booktitle = "Proceedings of the 15th International Conference on Solid State Sensors, Actuators and Microsystems",

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note = "15th International Conference on Solid-State Sensors, Actuators and Microsystems ; Conference date: 21-06-2009 Through 25-06-2009",

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Izadi, N, de Boer, MJ, Berenschot, JW , Wiegerink, RJ, Lammerink, TSJ, Jansen, HV, Mogdans, J & Krijnen, GJM 2009, Fabrication of dense flow sensor arrays on flexible membranes. in Proceedings of the 15th International Conference on Solid State Sensors, Actuators and Microsystems. IEEE, USA, pp. 1075-1078, 15th International Conference on Solid-State Sensors, Actuators and Microsystems, Denver, Colorado, United States, 21/06/09. https://doi.org/10.1109/SENSOR.2009.5285945

Fabrication of dense flow sensor arrays on flexible membranes. / Izadi, N.; de Boer, Meint J.; Berenschot, Johan W. et al.
Proceedings of the 15th International Conference on Solid State Sensors, Actuators and Microsystems. USA: IEEE, 2009. p. 1075-1078.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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AU - Jansen, Henricus V.

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