Biological sensory systems often display great performance which inspires engineers to design artificial counterparts. In this paper we report the fabrication of aquatic hair based flow sensors inspired by fish lateral line. Geometrically optimized flexible membranes of SU-8 with integrated electrodes underneath have been realized in a reliable, high yield process. By separating the liquid medium from readout electrodes we decrease squeeze film damping and eliminate electrolysis. The procedure allows dense membrane array fabrication.
|Conference||15th International Conference on Solid-State Sensors, Actuators and Microsystems|
|Abbreviated title||TRANSDUCERS 2009|
|Period||21/06/09 → 25/06/09|
- Flow sensors
- TST-Life like
- Lateral line