Fabrication of gold-nanoparticle arrays using photolithography and thermal dewetting

Lennart de Vreede; Kristian Göeken; Kristian Göeken; Ron Gill; Ron Gill; Albert van den Berg; Jan C.T. Eijkel

Fabrication of gold-nanoparticle arrays using photolithography and thermal dewetting

Lennart de Vreede, Kristian Göeken, Kristian Göeken, Ron Gill, Ron Gill, Albert van den Berg, Jan C.T. Eijkel

Nanobiophysics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Abstract

We demonstrate a new manufacturing method using only basic cleanroom techniques to produce an array of 106 100 nm diameter gold-nanoparticles (GNPs) of equal shape and 5 μm spacing on a fused silica surface. Photolithography and sputtering are used to produce gold islets, followed by a simple heating step (thermal dewetting) to reduce the size and transform the shape of the sputtered gold islets. The geometrically precisely controlled array provides an increase in sen-sitivity for a recently introduced plasmonic biosensing method with proven femtomolar sensitivity

Original language	Undefined
Title of host publication	17th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS
Editors	R. Zengerle
Place of Publication	Freiburg
Publisher	The Priniting House
Pages	1418-1420
Number of pages	3
ISBN (Print)	978-0-9798064-6-9
Publication status	Published - 27 Oct 2013
Event	17th International Conference on Miniaturized Systems for Chemistry and Life Sciences, μTAS 2013 - Freiburg, Germany Duration: 27 Oct 2013 → 31 Oct 2013 Conference number: 17

Publication series

Name	MicroTAS
Publisher	The Priniting House
Number	MicroTAS 2013
ISSN (Print)	1556-5904

Conference

Conference	17th International Conference on Miniaturized Systems for Chemistry and Life Sciences, μTAS 2013
Abbreviated title	MicroTAS
Country	Germany
City	Freiburg
Period	27/10/13 → 31/10/13

Keywords

EWI-24050
METIS-300195
IR-88172

Access to Document

http://eprints.eemcs.utwente.nl/secure2/24050/01/475_0420.pdf

Cite this

de Vreede, L., Göeken, K., Göeken, K., Gill, R., Gill, R., van den Berg, A., & Eijkel, J. C. T. (2013). Fabrication of gold-nanoparticle arrays using photolithography and thermal dewetting. In R. Zengerle (Ed.), 17th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS (pp. 1418-1420). (MicroTAS; No. MicroTAS 2013). The Priniting House. http://eprints.eemcs.utwente.nl/secure2/24050/01/475_0420.pdf

de Vreede, Lennart ; Göeken, Kristian ; Göeken, Kristian ; Gill, Ron ; Gill, Ron ; van den Berg, Albert ; Eijkel, Jan C.T. / Fabrication of gold-nanoparticle arrays using photolithography and thermal dewetting. 17th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS. editor / R. Zengerle. Freiburg : The Priniting House, 2013. pp. 1418-1420 (MicroTAS; MicroTAS 2013).

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title = "Fabrication of gold-nanoparticle arrays using photolithography and thermal dewetting",

abstract = "We demonstrate a new manufacturing method using only basic cleanroom techniques to produce an array of 106 100 nm diameter gold-nanoparticles (GNPs) of equal shape and 5 μm spacing on a fused silica surface. Photolithography and sputtering are used to produce gold islets, followed by a simple heating step (thermal dewetting) to reduce the size and transform the shape of the sputtered gold islets. The geometrically precisely controlled array provides an increase in sen-sitivity for a recently introduced plasmonic biosensing method with proven femtomolar sensitivity",

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year = "2013",

month = oct,

day = "27",

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isbn = "978-0-9798064-6-9",

series = "MicroTAS",

publisher = "The Priniting House",

number = "MicroTAS 2013",

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de Vreede, L, Göeken, K, Göeken, K, Gill, R, Gill, R, van den Berg, A & Eijkel, JCT 2013, Fabrication of gold-nanoparticle arrays using photolithography and thermal dewetting. in R Zengerle (ed.), 17th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS. MicroTAS, no. MicroTAS 2013, The Priniting House, Freiburg, pp. 1418-1420, 17th International Conference on Miniaturized Systems for Chemistry and Life Sciences, μTAS 2013, Freiburg, Germany, 27/10/13. <http://eprints.eemcs.utwente.nl/secure2/24050/01/475_0420.pdf>

Fabrication of gold-nanoparticle arrays using photolithography and thermal dewetting. / de Vreede, Lennart; Göeken, Kristian; Göeken, Kristian; Gill, Ron; Gill, Ron; van den Berg, Albert ; Eijkel, Jan C.T.

17th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS. ed. / R. Zengerle. Freiburg : The Priniting House, 2013. p. 1418-1420 (MicroTAS; No. MicroTAS 2013).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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T1 - Fabrication of gold-nanoparticle arrays using photolithography and thermal dewetting

AU - de Vreede, Lennart

AU - Göeken, Kristian

AU - Gill, Ron

AU - van den Berg, Albert

AU - Eijkel, Jan C.T.

N1 - Conference code: 17

PY - 2013/10/27

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N2 - We demonstrate a new manufacturing method using only basic cleanroom techniques to produce an array of 106 100 nm diameter gold-nanoparticles (GNPs) of equal shape and 5 μm spacing on a fused silica surface. Photolithography and sputtering are used to produce gold islets, followed by a simple heating step (thermal dewetting) to reduce the size and transform the shape of the sputtered gold islets. The geometrically precisely controlled array provides an increase in sen-sitivity for a recently introduced plasmonic biosensing method with proven femtomolar sensitivity

AB - We demonstrate a new manufacturing method using only basic cleanroom techniques to produce an array of 106 100 nm diameter gold-nanoparticles (GNPs) of equal shape and 5 μm spacing on a fused silica surface. Photolithography and sputtering are used to produce gold islets, followed by a simple heating step (thermal dewetting) to reduce the size and transform the shape of the sputtered gold islets. The geometrically precisely controlled array provides an increase in sen-sitivity for a recently introduced plasmonic biosensing method with proven femtomolar sensitivity

KW - EWI-24050

KW - METIS-300195

KW - IR-88172

M3 - Conference contribution

SN - 978-0-9798064-6-9

T3 - MicroTAS

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EP - 1420

BT - 17th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS

A2 - Zengerle, R.

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Y2 - 27 October 2013 through 31 October 2013

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