Fabrication of gold-nanoparticle arrays using photolithography and thermal dewetting

Lennart de Vreede, Kristian Göeken, Kristian Göeken, Ron Gill, Ron Gill, Albert van den Berg, Jan C.T. Eijkel

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Abstract

We demonstrate a new manufacturing method using only basic cleanroom techniques to produce an array of 106 100 nm diameter gold-nanoparticles (GNPs) of equal shape and 5 μm spacing on a fused silica surface. Photolithography and sputtering are used to produce gold islets, followed by a simple heating step (thermal dewetting) to reduce the size and transform the shape of the sputtered gold islets. The geometrically precisely controlled array provides an increase in sen-sitivity for a recently introduced plasmonic biosensing method with proven femtomolar sensitivity
Original languageUndefined
Title of host publication17th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS
EditorsR. Zengerle
Place of PublicationFreiburg
PublisherThe Priniting House
Pages1418-1420
Number of pages3
ISBN (Print)978-0-9798064-6-9
Publication statusPublished - 27 Oct 2013
Event17th International Conference on Miniaturized Systems for Chemistry and Life Sciences, μTAS 2013 - Freiburg, Germany
Duration: 27 Oct 201331 Oct 2013
Conference number: 17

Publication series

NameMicroTAS
PublisherThe Priniting House
NumberMicroTAS 2013
ISSN (Print)1556-5904

Conference

Conference17th International Conference on Miniaturized Systems for Chemistry and Life Sciences, μTAS 2013
Abbreviated titleMicroTAS
CountryGermany
CityFreiburg
Period27/10/1331/10/13

Keywords

  • EWI-24050
  • METIS-300195
  • IR-88172

Cite this

de Vreede, L., Göeken, K., Göeken, K., Gill, R., Gill, R., van den Berg, A., & Eijkel, J. C. T. (2013). Fabrication of gold-nanoparticle arrays using photolithography and thermal dewetting. In R. Zengerle (Ed.), 17th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS (pp. 1418-1420). (MicroTAS; No. MicroTAS 2013). Freiburg: The Priniting House.