Fabrication of IC-compatible capacitive sensors by polymer processing

M. Pedersen, Wouter Olthuis, Piet Bergveld

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publicationProceedings of the SPIE Conference on Smart Structures and Materials
    Place of PublicationSan Diego, USA
    Pages70-81
    Publication statusPublished - 24 Nov 1997

    Keywords

    • METIS-113759

    Cite this

    Pedersen, M., Olthuis, W., & Bergveld, P. (1997). Fabrication of IC-compatible capacitive sensors by polymer processing. In Proceedings of the SPIE Conference on Smart Structures and Materials (pp. 70-81). San Diego, USA.