Fabrication of IC-compatible capacitive sensors by polymer processing

M. Pedersen, Wouter Olthuis, Piet Bergveld

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publicationProceedings of the SPIE Conference on Smart Structures and Materials
    Place of PublicationSan Diego, USA
    Publication statusPublished - 24 Nov 1997


    • METIS-113759

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