Fabrication of IC-compatible capacitive sensors by polymer processing

Michael Pedersen, Wouter Olthuis, Piet Bergveld

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	English
Title of host publication	Proceedings of the SPIE Conference on Smart Structures and Materials
Place of Publication	San Diego, USA
Pages	70-81
Publication status	Published - 24 Nov 1997

Keywords

@inproceedings{c7479760e4d847d2a747f92931045189,

title = "Fabrication of IC-compatible capacitive sensors by polymer processing",

keywords = "METIS-113759",

author = "Michael Pedersen and Wouter Olthuis and Piet Bergveld",

year = "1997",

month = nov,

day = "24",

language = "English",

isbn = "0-8194-2459-5",

pages = "70--81",

booktitle = "Proceedings of the SPIE Conference on Smart Structures and Materials",

}