Fabrication of integrated bimorphs with self aligned tips for optical switching in 2-D photonic crystal waveguides

S.M. Chakkalakkal Abdulla, L.J. Kauppinen, Mindert Dijkstra, Meint J. de Boer, Johan W. Berenschot, R.M. de Ridder, Gijsbertus J.M. Krijnen

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    Abstract

    This paper presents the fabrication technology for a novel class of photonic devices. This technology integrates silicon 2-D photonic crystal (PhC) waveguides and electrostatically actuated bimorph cantilevers with tips that are self-aligned relative to the holes of the PhC. The bimorph cantilevers modulate the propagation properties of the slab PhC depending on the proximity of the tips to the holes. The integrated devices have been successfully fabricated on wafer scale by surface micromachining techniques. First experiments with these devices have shown 80% throughput modulation using a square wave drive signal of 0 to 8 V at 1 kHz.
    Original languageUndefined
    Title of host publication21st Micromechanics and Micro systems Europe Workshop (MME2010)
    Place of PublicationEnschede, The Netherlands
    PublisherUniversity of Twente, Faculty of Electrical Engineering, Mathematics and Computer Science
    Pages120-123
    Number of pages4
    ISBN (Print)978-90-81673716
    Publication statusPublished - 26 Sep 2010
    Event21st Micromechanics and Microsystems Europe Workshop, MME 2010 - University of Twente, Enschede, Netherlands
    Duration: 26 Sep 201029 Sep 2010
    Conference number: 21

    Publication series

    Name
    PublisherUniversity of Twente, Faculty of Electrical Engineering, Mathematics and Computer Science

    Workshop

    Workshop21st Micromechanics and Microsystems Europe Workshop, MME 2010
    Abbreviated titleMME
    CountryNetherlands
    CityEnschede
    Period26/09/1029/09/10

    Keywords

    • METIS-271136
    • Bimorph
    • IR-74661
    • self aligned tips
    • opto-mechanical modulation
    • EWI-18817
    • photonic crystal waveguide

    Cite this

    Chakkalakkal Abdulla, S. M., Kauppinen, L. J., Dijkstra, M., de Boer, M. J., Berenschot, J. W., de Ridder, R. M., & Krijnen, G. J. M. (2010). Fabrication of integrated bimorphs with self aligned tips for optical switching in 2-D photonic crystal waveguides. In 21st Micromechanics and Micro systems Europe Workshop (MME2010) (pp. 120-123). Enschede, The Netherlands: University of Twente, Faculty of Electrical Engineering, Mathematics and Computer Science.