Fabrication of integrated bimorphs with self aligned tips for optical switching in 2-D photonic crystal waveguides

S.M. Chakkalakkal Abdulla; L.J. Kauppinen; Mindert Dijkstra; Meint J. de Boer; Johan W. Berenschot; R.M. de Ridder; Gijsbertus J.M. Krijnen

Fabrication of integrated bimorphs with self aligned tips for optical switching in 2-D photonic crystal waveguides

S.M. Chakkalakkal Abdulla, L.J. Kauppinen, Mindert Dijkstra, Meint J. de Boer, Johan W. Berenschot, R.M. de Ridder, Gijsbertus J.M. Krijnen

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

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Abstract

This paper presents the fabrication technology for a novel class of photonic devices. This technology integrates silicon 2-D photonic crystal (PhC) waveguides and electrostatically actuated bimorph cantilevers with tips that are self-aligned relative to the holes of the PhC. The bimorph cantilevers modulate the propagation properties of the slab PhC depending on the proximity of the tips to the holes. The integrated devices have been successfully fabricated on wafer scale by surface micromachining techniques. First experiments with these devices have shown 80% throughput modulation using a square wave drive signal of 0 to 8 V at 1 kHz.

Original language	Undefined
Title of host publication	21st Micromechanics and Micro systems Europe Workshop (MME2010)
Place of Publication	Enschede, The Netherlands
Publisher	University of Twente, Faculty of Electrical Engineering, Mathematics and Computer Science
Pages	120-123
Number of pages	4
ISBN (Print)	978-90-81673716
Publication status	Published - 26 Sept 2010
Event	21st Micromechanics and Microsystems Europe Workshop, MME 2010 - University of Twente, Enschede, Netherlands Duration: 26 Sept 2010 → 29 Sept 2010 Conference number: 21

Publication series

Name
Publisher	University of Twente, Faculty of Electrical Engineering, Mathematics and Computer Science

Workshop

Workshop	21st Micromechanics and Microsystems Europe Workshop, MME 2010
Abbreviated title	MME
Country/Territory	Netherlands
City	Enschede
Period	26/09/10 → 29/09/10

Keywords

METIS-271136
Bimorph
IR-74661
self aligned tips
opto-mechanical modulation
EWI-18817
photonic crystal waveguide

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Cite this

Chakkalakkal Abdulla, S. M., Kauppinen, L. J., Dijkstra, M., de Boer, M. J., Berenschot, J. W., de Ridder, R. M., & Krijnen, G. J. M. (2010). Fabrication of integrated bimorphs with self aligned tips for optical switching in 2-D photonic crystal waveguides. In 21st Micromechanics and Micro systems Europe Workshop (MME2010) (pp. 120-123). University of Twente, Faculty of Electrical Engineering, Mathematics and Computer Science.

Chakkalakkal Abdulla, S.M. ; Kauppinen, L.J. ; Dijkstra, Mindert et al. / Fabrication of integrated bimorphs with self aligned tips for optical switching in 2-D photonic crystal waveguides. 21st Micromechanics and Micro systems Europe Workshop (MME2010). Enschede, The Netherlands : University of Twente, Faculty of Electrical Engineering, Mathematics and Computer Science, 2010. pp. 120-123

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abstract = "This paper presents the fabrication technology for a novel class of photonic devices. This technology integrates silicon 2-D photonic crystal (PhC) waveguides and electrostatically actuated bimorph cantilevers with tips that are self-aligned relative to the holes of the PhC. The bimorph cantilevers modulate the propagation properties of the slab PhC depending on the proximity of the tips to the holes. The integrated devices have been successfully fabricated on wafer scale by surface micromachining techniques. First experiments with these devices have shown 80% throughput modulation using a square wave drive signal of 0 to 8 V at 1 kHz.",

keywords = "METIS-271136, Bimorph, IR-74661, self aligned tips, opto-mechanical modulation, EWI-18817, photonic crystal waveguide",

author = "{Chakkalakkal Abdulla}, S.M. and L.J. Kauppinen and Mindert Dijkstra and {de Boer}, {Meint J.} and Berenschot, {Johan W.} and {de Ridder}, R.M. and Krijnen, {Gijsbertus J.M.}",

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publisher = "University of Twente, Faculty of Electrical Engineering, Mathematics and Computer Science",

pages = "120--123",

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Chakkalakkal Abdulla, SM, Kauppinen, LJ, Dijkstra, M, de Boer, MJ, Berenschot, JW, de Ridder, RM & Krijnen, GJM 2010, Fabrication of integrated bimorphs with self aligned tips for optical switching in 2-D photonic crystal waveguides. in 21st Micromechanics and Micro systems Europe Workshop (MME2010). University of Twente, Faculty of Electrical Engineering, Mathematics and Computer Science, Enschede, The Netherlands, pp. 120-123, 21st Micromechanics and Microsystems Europe Workshop, MME 2010, Enschede, Netherlands, 26/09/10.

Fabrication of integrated bimorphs with self aligned tips for optical switching in 2-D photonic crystal waveguides. / Chakkalakkal Abdulla, S.M.; Kauppinen, L.J.; Dijkstra, Mindert et al.
21st Micromechanics and Micro systems Europe Workshop (MME2010). Enschede, The Netherlands: University of Twente, Faculty of Electrical Engineering, Mathematics and Computer Science, 2010. p. 120-123.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

TY - GEN

T1 - Fabrication of integrated bimorphs with self aligned tips for optical switching in 2-D photonic crystal waveguides

AU - Chakkalakkal Abdulla, S.M.

AU - Kauppinen, L.J.

AU - Dijkstra, Mindert

AU - de Boer, Meint J.

AU - Berenschot, Johan W.

AU - de Ridder, R.M.

AU - Krijnen, Gijsbertus J.M.

N1 - Conference code: 21

PY - 2010/9/26

Y1 - 2010/9/26

N2 - This paper presents the fabrication technology for a novel class of photonic devices. This technology integrates silicon 2-D photonic crystal (PhC) waveguides and electrostatically actuated bimorph cantilevers with tips that are self-aligned relative to the holes of the PhC. The bimorph cantilevers modulate the propagation properties of the slab PhC depending on the proximity of the tips to the holes. The integrated devices have been successfully fabricated on wafer scale by surface micromachining techniques. First experiments with these devices have shown 80% throughput modulation using a square wave drive signal of 0 to 8 V at 1 kHz.

AB - This paper presents the fabrication technology for a novel class of photonic devices. This technology integrates silicon 2-D photonic crystal (PhC) waveguides and electrostatically actuated bimorph cantilevers with tips that are self-aligned relative to the holes of the PhC. The bimorph cantilevers modulate the propagation properties of the slab PhC depending on the proximity of the tips to the holes. The integrated devices have been successfully fabricated on wafer scale by surface micromachining techniques. First experiments with these devices have shown 80% throughput modulation using a square wave drive signal of 0 to 8 V at 1 kHz.

KW - METIS-271136

KW - Bimorph

KW - IR-74661

KW - self aligned tips

KW - opto-mechanical modulation

KW - EWI-18817

KW - photonic crystal waveguide

M3 - Conference contribution

SN - 978-90-81673716

SP - 120

EP - 123

BT - 21st Micromechanics and Micro systems Europe Workshop (MME2010)

PB - University of Twente, Faculty of Electrical Engineering, Mathematics and Computer Science

CY - Enschede, The Netherlands

T2 - 21st Micromechanics and Microsystems Europe Workshop, MME 2010

Y2 - 26 September 2010 through 29 September 2010

ER -

Chakkalakkal Abdulla SM, Kauppinen LJ, Dijkstra M, de Boer MJ, Berenschot JW, de Ridder RM et al. Fabrication of integrated bimorphs with self aligned tips for optical switching in 2-D photonic crystal waveguides. In 21st Micromechanics and Micro systems Europe Workshop (MME2010). Enschede, The Netherlands: University of Twente, Faculty of Electrical Engineering, Mathematics and Computer Science. 2010. p. 120-123