Fabrication of integrated bimorphs with self aligned tips for optical switching in 2-D photonic crystal waveguides

S.M. Chakkalakkal Abdulla, L.J. Kauppinen, Mindert Dijkstra, Meint J. de Boer, Johan W. Berenschot, R.M. de Ridder, Gijsbertus J.M. Krijnen

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

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    Abstract

    This paper presents the fabrication technology for a novel class of photonic devices. This technology integrates silicon 2-D photonic crystal (PhC) waveguides and electrostatically actuated bimorph cantilevers with tips that are self-aligned relative to the holes of the PhC. The bimorph cantilevers modulate the propagation properties of the slab PhC depending on the proximity of the tips to the holes. The integrated devices have been successfully fabricated on wafer scale by surface micromachining techniques. First experiments with these devices have shown 80% throughput modulation using a square wave drive signal of 0 to 8 V at 1 kHz.
    Original languageUndefined
    Title of host publication21st Micromechanics and Micro systems Europe Workshop (MME2010)
    Place of PublicationEnschede, The Netherlands
    PublisherUniversity of Twente, Faculty of Electrical Engineering, Mathematics and Computer Science
    Pages120-123
    Number of pages4
    ISBN (Print)978-90-81673716
    Publication statusPublished - 26 Sep 2010
    Event21st Micromechanics and Microsystems Europe Workshop, MME 2010 - University of Twente, Enschede, Netherlands
    Duration: 26 Sep 201029 Sep 2010
    Conference number: 21

    Publication series

    Name
    PublisherUniversity of Twente, Faculty of Electrical Engineering, Mathematics and Computer Science

    Workshop

    Workshop21st Micromechanics and Microsystems Europe Workshop, MME 2010
    Abbreviated titleMME
    CountryNetherlands
    CityEnschede
    Period26/09/1029/09/10

    Keywords

    • METIS-271136
    • Bimorph
    • IR-74661
    • self aligned tips
    • opto-mechanical modulation
    • EWI-18817
    • photonic crystal waveguide

    Cite this

    Chakkalakkal Abdulla, S. M., Kauppinen, L. J., Dijkstra, M., de Boer, M. J., Berenschot, J. W., de Ridder, R. M., & Krijnen, G. J. M. (2010). Fabrication of integrated bimorphs with self aligned tips for optical switching in 2-D photonic crystal waveguides. In 21st Micromechanics and Micro systems Europe Workshop (MME2010) (pp. 120-123). Enschede, The Netherlands: University of Twente, Faculty of Electrical Engineering, Mathematics and Computer Science.
    Chakkalakkal Abdulla, S.M. ; Kauppinen, L.J. ; Dijkstra, Mindert ; de Boer, Meint J. ; Berenschot, Johan W. ; de Ridder, R.M. ; Krijnen, Gijsbertus J.M. / Fabrication of integrated bimorphs with self aligned tips for optical switching in 2-D photonic crystal waveguides. 21st Micromechanics and Micro systems Europe Workshop (MME2010). Enschede, The Netherlands : University of Twente, Faculty of Electrical Engineering, Mathematics and Computer Science, 2010. pp. 120-123
    @inproceedings{b7ec9f1d0c4847d6a8bfd237f3883824,
    title = "Fabrication of integrated bimorphs with self aligned tips for optical switching in 2-D photonic crystal waveguides",
    abstract = "This paper presents the fabrication technology for a novel class of photonic devices. This technology integrates silicon 2-D photonic crystal (PhC) waveguides and electrostatically actuated bimorph cantilevers with tips that are self-aligned relative to the holes of the PhC. The bimorph cantilevers modulate the propagation properties of the slab PhC depending on the proximity of the tips to the holes. The integrated devices have been successfully fabricated on wafer scale by surface micromachining techniques. First experiments with these devices have shown 80{\%} throughput modulation using a square wave drive signal of 0 to 8 V at 1 kHz.",
    keywords = "METIS-271136, Bimorph, IR-74661, self aligned tips, opto-mechanical modulation, EWI-18817, photonic crystal waveguide",
    author = "{Chakkalakkal Abdulla}, S.M. and L.J. Kauppinen and Mindert Dijkstra and {de Boer}, {Meint J.} and Berenschot, {Johan W.} and {de Ridder}, R.M. and Krijnen, {Gijsbertus J.M.}",
    year = "2010",
    month = "9",
    day = "26",
    language = "Undefined",
    isbn = "978-90-81673716",
    publisher = "University of Twente, Faculty of Electrical Engineering, Mathematics and Computer Science",
    pages = "120--123",
    booktitle = "21st Micromechanics and Micro systems Europe Workshop (MME2010)",

    }

    Chakkalakkal Abdulla, SM, Kauppinen, LJ, Dijkstra, M, de Boer, MJ, Berenschot, JW, de Ridder, RM & Krijnen, GJM 2010, Fabrication of integrated bimorphs with self aligned tips for optical switching in 2-D photonic crystal waveguides. in 21st Micromechanics and Micro systems Europe Workshop (MME2010). University of Twente, Faculty of Electrical Engineering, Mathematics and Computer Science, Enschede, The Netherlands, pp. 120-123, 21st Micromechanics and Microsystems Europe Workshop, MME 2010, Enschede, Netherlands, 26/09/10.

    Fabrication of integrated bimorphs with self aligned tips for optical switching in 2-D photonic crystal waveguides. / Chakkalakkal Abdulla, S.M.; Kauppinen, L.J.; Dijkstra, Mindert; de Boer, Meint J.; Berenschot, Johan W.; de Ridder, R.M.; Krijnen, Gijsbertus J.M.

    21st Micromechanics and Micro systems Europe Workshop (MME2010). Enschede, The Netherlands : University of Twente, Faculty of Electrical Engineering, Mathematics and Computer Science, 2010. p. 120-123.

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

    TY - GEN

    T1 - Fabrication of integrated bimorphs with self aligned tips for optical switching in 2-D photonic crystal waveguides

    AU - Chakkalakkal Abdulla, S.M.

    AU - Kauppinen, L.J.

    AU - Dijkstra, Mindert

    AU - de Boer, Meint J.

    AU - Berenschot, Johan W.

    AU - de Ridder, R.M.

    AU - Krijnen, Gijsbertus J.M.

    PY - 2010/9/26

    Y1 - 2010/9/26

    N2 - This paper presents the fabrication technology for a novel class of photonic devices. This technology integrates silicon 2-D photonic crystal (PhC) waveguides and electrostatically actuated bimorph cantilevers with tips that are self-aligned relative to the holes of the PhC. The bimorph cantilevers modulate the propagation properties of the slab PhC depending on the proximity of the tips to the holes. The integrated devices have been successfully fabricated on wafer scale by surface micromachining techniques. First experiments with these devices have shown 80% throughput modulation using a square wave drive signal of 0 to 8 V at 1 kHz.

    AB - This paper presents the fabrication technology for a novel class of photonic devices. This technology integrates silicon 2-D photonic crystal (PhC) waveguides and electrostatically actuated bimorph cantilevers with tips that are self-aligned relative to the holes of the PhC. The bimorph cantilevers modulate the propagation properties of the slab PhC depending on the proximity of the tips to the holes. The integrated devices have been successfully fabricated on wafer scale by surface micromachining techniques. First experiments with these devices have shown 80% throughput modulation using a square wave drive signal of 0 to 8 V at 1 kHz.

    KW - METIS-271136

    KW - Bimorph

    KW - IR-74661

    KW - self aligned tips

    KW - opto-mechanical modulation

    KW - EWI-18817

    KW - photonic crystal waveguide

    M3 - Conference contribution

    SN - 978-90-81673716

    SP - 120

    EP - 123

    BT - 21st Micromechanics and Micro systems Europe Workshop (MME2010)

    PB - University of Twente, Faculty of Electrical Engineering, Mathematics and Computer Science

    CY - Enschede, The Netherlands

    ER -

    Chakkalakkal Abdulla SM, Kauppinen LJ, Dijkstra M, de Boer MJ, Berenschot JW, de Ridder RM et al. Fabrication of integrated bimorphs with self aligned tips for optical switching in 2-D photonic crystal waveguides. In 21st Micromechanics and Micro systems Europe Workshop (MME2010). Enschede, The Netherlands: University of Twente, Faculty of Electrical Engineering, Mathematics and Computer Science. 2010. p. 120-123