Fabrication of lamellar multilayer gratings using UV-NIL and modified Bosch etching

R. van der Meer; B. Krishnan; I.V. Kozhevnikov; B. Vratzov; Hubertus M.J. Bastiaens; Jurriaan Huskens; Wilfred Gerard van der Wiel; Klaus J. Boller; Frederik Bijkerk

Fabrication of lamellar multilayer gratings using UV-NIL and modified Bosch etching

R. van der Meer, B. Krishnan, I.V. Kozhevnikov, B. Vratzov, Hubertus M.J. Bastiaens, Jurriaan Huskens, Wilfred Gerard van der Wiel, Klaus J. Boller, Frederik Bijkerk

Research output: Contribution to conference › Poster › Other research output

Original language	English
Pages	-
Publication status	Published - 17 Nov 2010
Event	Netherlands MicroNanoConference 2010 - University of Twente, Enschede, Netherlands Duration: 17 Nov 2010 → 18 Nov 2010

Conference

Conference	Netherlands MicroNanoConference 2010
Country/Territory	Netherlands
City	Enschede
Period	17/11/10 → 18/11/10

Keywords

METIS-269990

Cite this

@conference{abb6176d171d400c8d32c30e25f57ff8,

title = "Fabrication of lamellar multilayer gratings using UV-NIL and modified Bosch etching",

keywords = "METIS-269990",

author = "{van der Meer}, R. and B. Krishnan and I.V. Kozhevnikov and B. Vratzov and Bastiaens, {Hubertus M.J.} and Jurriaan Huskens and {van der Wiel}, {Wilfred Gerard} and Boller, {Klaus J.} and Frederik Bijkerk",

year = "2010",

month = nov,

day = "17",

language = "English",

pages = "--",

note = "Netherlands MicroNanoConference 2010 ; Conference date: 17-11-2010 Through 18-11-2010",

}

TY - CONF

T1 - Fabrication of lamellar multilayer gratings using UV-NIL and modified Bosch etching

AU - van der Meer, R.

AU - Krishnan, B.

AU - Kozhevnikov, I.V.

AU - Vratzov, B.

AU - Bastiaens, Hubertus M.J.

AU - Huskens, Jurriaan

AU - van der Wiel, Wilfred Gerard

AU - Boller, Klaus J.

AU - Bijkerk, Frederik

PY - 2010/11/17

Y1 - 2010/11/17

KW - METIS-269990

M3 - Poster

SP - -

T2 - Netherlands MicroNanoConference 2010

Y2 - 17 November 2010 through 18 November 2010

ER -