Fabrication of lamellar multilayer gratings using UV-NIL and modified Bosch etching

R. van der Meer, B. Krishnan, I.V. Kozhevnikov, B. Vratzov, Hubertus M.J. Bastiaens, Jurriaan Huskens, Wilfred Gerard van der Wiel, Klaus J. Boller, Frederik Bijkerk

Research output: Contribution to conferencePoster

Original languageEnglish
Pages-
Publication statusPublished - 17 Nov 2010
EventNetherlands MicroNanoConference 2010 - University of Twente, Enschede, Netherlands
Duration: 17 Nov 201018 Nov 2010

Conference

ConferenceNetherlands MicroNanoConference 2010
CountryNetherlands
CityEnschede
Period17/11/1018/11/10

Keywords

  • METIS-269990

Cite this

van der Meer, R., Krishnan, B., Kozhevnikov, I. V., Vratzov, B., Bastiaens, H. M. J., Huskens, J., ... Bijkerk, F. (2010). Fabrication of lamellar multilayer gratings using UV-NIL and modified Bosch etching. -. Poster session presented at Netherlands MicroNanoConference 2010, Enschede, Netherlands.