Fabrication of large-volume rectangular channels using trench-sidewall technology and a SOI substrate

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

    111 Downloads (Pure)

    Fingerprint

    Dive into the research topics of 'Fabrication of large-volume rectangular channels using trench-sidewall technology and a SOI substrate'. Together they form a unique fingerprint.

    Earth & Environmental Sciences