Fabrication of low dark-count PureB single-photon avalanche diodes

Lin Qi, K. R.C. Mok, Mahdi Aminian, Edoardo Charbon, Lis K. Nanver

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

4 Citations (Scopus)

Abstract

Single-photon avalanche diodes (SPADs) have been fabricated in Si by using PureB (Pure Boron) chemical-vapor deposition (CVD) to create both a nanometer-thin anode junction and robust light-entrance window. The device is sensitive to low-penetration-depth radiation such as UV light and low-energy electrons. Ideal I-V characteristics are obtained for operation in Geiger mode, whereas biasing is well above the breakdown voltage. The dark count rate (DCR) can be as low as 5 Hz at room temperature for an active area of 7 μm2. An implicit guard ring as small as 0.5 μm wide is implemented using an n-enhancement implantation in the central region of the diode, thus achieving a high fill-factor.

Original languageEnglish
Title of host publication2014 29th Symposium on Microelectronics Technology and Devices
Subtitle of host publicationChip in Aracaju, SBMicro 2014
PublisherIEEE
ISBN (Electronic)9781479946969
DOIs
Publication statusPublished - 29 Oct 2014
Externally publishedYes
Event29th Symposium on Microelectronics Technology and Devices, SBMicro 2014 - Aracaju, Brazil
Duration: 1 Sep 20145 Sep 2014
Conference number: 29

Conference

Conference29th Symposium on Microelectronics Technology and Devices, SBMicro 2014
Abbreviated titleSBMicro 2014
CountryBrazil
CityAracaju
Period1/09/145/09/14

Keywords

  • Avalanche breakdown
  • photodiode
  • pure boron chemical vapor deposition
  • single-photon avalanche diode (SPAD)
  • ultrashallow junctions

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  • Cite this

    Qi, L., Mok, K. R. C., Aminian, M., Charbon, E., & Nanver, L. K. (2014). Fabrication of low dark-count PureB single-photon avalanche diodes. In 2014 29th Symposium on Microelectronics Technology and Devices: Chip in Aracaju, SBMicro 2014 [6940113] IEEE. https://doi.org/10.1109/SBMicro.2014.6940113